MEMS microgrippers with thin gripping tips

Journal of Micromechanics and Microengineering

Volumn 21, Issue 10, 2011, Pages

  Chen, Brandon K ^a   Zhang, Yong ^a   Perovic, Doug D ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION FUNCTION; DEVICE PERFORMANCE; GOLD SPHERES; HIGH ASPECT RATIO STRUCTURES; MEMS MICROGRIPPERS; MICRO GRIPPER; SCANNING ELECTRON MICROSCOPE; SILICON LAYER; SILICON ON INSULATOR WAFERS; SMALL OBJECTS; SUBMICROMETERS;

ASPECT RATIO; GRIPPERS; MICROMETERS; SCANNING ELECTRON MICROSCOPY; SILICON OXIDES; SILICON WAFERS; THICKNESS MEASUREMENT;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 80053606733     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/10/105004     Document Type: Article

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