Image-based autonomous micromanipulation system for arrangement of spheres in a scanning electron microscope

Review of Scientific Instruments

Volumn 75, Issue 6, 2004, Pages 2033-2042

  Kasaya, Takeshi ^a   Miyazaki, Hideki T ^b   Saito, Shigeki ^c   Koyano, Koichi ^d   Yamaura, Tomio ^a   Sato, Tomomasa ^e  

^a Tokyo Engineering University   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^d HITACHI LTD   (Japan)

^e UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DEGREES OF FREEDOM (MECHANICS); IMAGE ANALYSIS; MATHEMATICAL TRANSFORMATIONS; MICROMANIPULATORS; MICROSTRUCTURE; NETWORKS (CIRCUITS); OPTICAL MICROSCOPY; OPTICAL SYSTEMS; OPTOELECTRONIC DEVICES; PATTERN RECOGNITION; PROBES; SENSORS;

FORCE SENSORS; IMAGE RECOGNITION; MICROMANIPULATION TECHNIQUES; PHOTONIC CRYSTALS;

SCANNING ELECTRON MICROSCOPY;

EID: 3042814445     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1753106     Document Type: Article

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