Microrobot system for automatic nanohandling inside a scanning electron microscope

IEEE/ASME Transactions on Mechatronics

Volumn 12, Issue 3, 2007, Pages 244-252

  Fatikow, Sergej ^a   Wich, Thomas ^a   Hülsen, Helge ^a   Sievers, Torsten ^a   Jähnisch, Marco ^b  

^a UNIVERSITY OF OLDENBURG   (Germany)

^b OFFIS INSTITUTE FOR INFORMATION TECHNOLOGY   (Germany)

Author keywords

Intelligent control; Microrobots; Nanohandling automation; Scanning electron microscope (SEM) image processing

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; INTELLIGENT CONTROL; MOBILE ROBOTS; ROBOTICS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

AUTOMATIC NANOHANDLING; CLIENT-SERVER CONTROL SYSTEM; MICROROBOT SYSTEM;

AUTOMATION;

EID: 34347387081     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2007.897252     Document Type: Article

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