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Volumn 23, Issue 18, 2012, Pages

High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories

Author keywords

[No Author keywords available]

Indexed keywords

A-FRAMES; AFM; AFM IMAGING; ATOMIC FORCE MICROSCOPE (AFM); CONSTANT FREQUENCY; FEED-BACK LOOP; FREQUENCY SPECTRA; HARMONIC WAVE FORMS; HIGH SPEED SCANNING; HIGH-SPEED; IMAGING SPEED; LISSAJOUS; MEASUREMENT NOISE; MULTI-RESOLUTIONS; RESONANT MODE; TEMPORAL RESOLUTION;

EID: 84860202957     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/18/185501     Document Type: Review
Times cited : (153)

References (34)
  • 2
    • 47749122624 scopus 로고    scopus 로고
    • Advances in AFM for the electrical characterization of semiconductors
    • 0034-4885 076501
    • Oliver R A 2008 Advances in AFM for the electrical characterization of semiconductors Rep. Prog. Phys. 71 076501
    • (2008) Rep. Prog. Phys. , vol.71 , Issue.7
    • Oliver, R.A.1
  • 3
    • 0037360868 scopus 로고    scopus 로고
    • Millipede - A MEMS-based scanning-probe data-storage system
    • 10.1109/TMAG.2003.808953 0018-9464
    • Eleftheriou E et al 2003 Millipede - a MEMS-based scanning-probe data-storage system IEEE Trans. Magn. 39 93845
    • (2003) IEEE Trans. Magn. , vol.39 , Issue.2 , pp. 938-945
    • Eleftheriou, E.1
  • 4
    • 51349118968 scopus 로고    scopus 로고
    • Probe-based ultrahigh-density storage technology
    • 10.1147/rd.524.0493 0018-8646
    • Pantazi A et al 2008 Probe-based ultrahigh-density storage technology IBM J. Res. Dev. 52 493511
    • (2008) IBM J. Res. Dev. , vol.52 , Issue.45 , pp. 493-511
    • Pantazi, A.1
  • 5
    • 3142702784 scopus 로고    scopus 로고
    • Atomic force microscopy measurements of crystal nucleation and growth rates in thin films of amorphous te alloys
    • 10.1063/1.1764591 0003-6951
    • Kalb J, Spaepen F and Wuttig M 2004 Atomic force microscopy measurements of crystal nucleation and growth rates in thin films of amorphous te alloys Appl. Phys. Lett. 84 52402
    • (2004) Appl. Phys. Lett. , vol.84 , Issue.25 , pp. 5240-5242
    • Kalb, J.1    Spaepen, F.2    Wuttig, M.3
  • 6
    • 54149113310 scopus 로고    scopus 로고
    • High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes
    • 10.1016/j.progsurf.2008.09.001 0079-6816
    • Ando T, Uchihashi T and Fukuma T 2008 High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes Prog. Surf. Sci. 83 337437
    • (2008) Prog. Surf. Sci. , vol.83 , Issue.7-9 , pp. 337-437
    • Ando, T.1    Uchihashi, T.2    Fukuma, T.3
  • 7
    • 2442420029 scopus 로고    scopus 로고
    • Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy
    • 10.1109/TCST.2004.824290 1063-6536
    • Schitter G and Stemmer A 2004 Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy IEEE Trans. Control Syst. Technol. 12 44954
    • (2004) IEEE Trans. Control Syst. Technol. , vol.12 , Issue.3 , pp. 449-454
    • Schitter, G.1    Stemmer, A.2
  • 8
    • 84856325637 scopus 로고    scopus 로고
    • Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner
    • 10.1109/TMECH.2011.2105499 1083-4435
    • Kenton B J and Leang K K 2012 Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner IEEE/ASME Trans. Mechatron. 17 35669
    • (2012) IEEE/ASME Trans. Mechatron. , vol.17 , Issue.2 , pp. 356-369
    • Kenton, B.J.1    Leang, K.K.2
  • 10
    • 17044388175 scopus 로고    scopus 로고
    • A mechanical microscope: High-speed atomic force microscopy
    • DOI 10.1063/1.1855407, 034106
    • Humphris A D L, Miles M J and Hobbs J K 2005 A mechanical microscope: high-speed atomic force microscopy Appl. Phys. Lett. 86 034106 (Pubitemid 40493523)
    • (2005) Applied Physics Letters , vol.86 , Issue.3 , pp. 1-3
    • Humphris, A.D.L.1    Miles, M.J.2    Hobbs, J.K.3
  • 12
    • 70350444482 scopus 로고    scopus 로고
    • High-speed serial-kinematic SPM scanner: Design and drive considerations
    • 10.1002/asjc.90 1561-8625
    • Leang K and Fleming A 2009 High-speed serial-kinematic SPM scanner: design and drive considerations Asian J. Control 11 14453
    • (2009) Asian J. Control , vol.11 , Issue.2 , pp. 144-153
    • Leang, K.1    Fleming, A.2
  • 13
    • 84860129726 scopus 로고    scopus 로고
    • High-bandwidth nanopositioner with magnetoresistance based position sensing
    • 10.1016/j.mechatronics.2011.07.009 0957-4158
    • Kartik V, Sebastian A, Tuma T, Pantazi A, Pozidis H and Sahoo D 2012 High-bandwidth nanopositioner with magnetoresistance based position sensing Mechatronics 22 295301
    • (2012) Mechatronics , vol.22 , Issue.3 , pp. 295-301
    • Kartik, V.1    Sebastian, A.2    Tuma, T.3    Pantazi, A.4    Pozidis, H.5    Sahoo, D.6
  • 14
    • 53349099502 scopus 로고    scopus 로고
    • Achieving subnanometer precision in a MEMS-based storage device during self-servo write process
    • 10.1109/TNANO.2008.926441 1536-125X
    • Sebastian A, Pantazi A, Moheimani S O R, Pozidis H and Eleftheriou E 2008 Achieving subnanometer precision in a MEMS-based storage device during self-servo write process IEEE Trans. Nanotechnol. 7 58695
    • (2008) IEEE Trans. Nanotechnol. , vol.7 , Issue.5 , pp. 586-595
    • Sebastian, A.1    Pantazi, A.2    Moheimani, S.O.R.3    Pozidis, H.4    Eleftheriou, E.5
  • 15
    • 58149215919 scopus 로고    scopus 로고
    • Robust broadband nanopositioning: Fundamental trade-offs, analysis, and design in a two-degree-of-freedom control framework
    • 0957-4484 035501
    • Lee C and Salapaka S M 2009 Robust broadband nanopositioning: fundamental trade-offs, analysis, and design in a two-degree-of-freedom control framework Nanotechnology 20 035501
    • (2009) Nanotechnology , vol.20 , Issue.3
    • Lee, C.1    Salapaka, S.M.2
  • 16
    • 77954602326 scopus 로고    scopus 로고
    • A new method for robust damping and tracking control of scanning probe microscope positioning stages
    • 10.1109/TNANO.2009.2032418 1536-125X
    • Fleming A, Aphale S and Moheimani S O R 2010 A new method for robust damping and tracking control of scanning probe microscope positioning stages IEEE Trans. Nanotechnol. 9 43848
    • (2010) IEEE Trans. Nanotechnol. , vol.9 , Issue.4 , pp. 438-448
    • Fleming, A.1    Aphale, S.2    Moheimani, S.O.R.3
  • 17
    • 33744927936 scopus 로고    scopus 로고
    • A survey of iterative learning control: A learning-based method for high-performance tracking control
    • DOI 10.1109/MCS.2006.1636313
    • Bristow D, Tharayil M and Alleyne A 2006 A survey of iterative learning control IEEE Control Syst. Mag. 26 96114 (Pubitemid 43840615)
    • (2006) IEEE Control Systems Magazine , vol.26 , Issue.3 , pp. 96-114
    • Bristow, D.A.1    Tharayil, M.2    Alleyne, A.G.3
  • 18
    • 70449625634 scopus 로고    scopus 로고
    • Repetitive control with Prandtl-Ishlinskii hysteresis inverse for piezo-based nanopositioning
    • 10.1109/ACC.2009.5160618
    • Shan Y and Leang K 2009 Repetitive control with Prandtl-Ishlinskii hysteresis inverse for piezo-based nanopositioning Proc. 2009 American Control Conf. pp 3016
    • (2009) Proc. 2009 American Control Conf. , pp. 301-306
    • Shan, Y.1    Leang, K.2
  • 19
    • 61549133477 scopus 로고    scopus 로고
    • Robust adaptive control of coupled parallel piezo-flexural nanopositioning stages
    • 10.1109/TMECH.2008.2006501 1083-4435
    • Bashash S and Jalili N 2009 Robust adaptive control of coupled parallel piezo-flexural nanopositioning stages IEEE/ASME Trans. Mechatron. 14 1120
    • (2009) IEEE/ASME Trans. Mechatron. , vol.14 , Issue.1 , pp. 11-20
    • Bashash, S.1    Jalili, N.2
  • 20
    • 68949083234 scopus 로고    scopus 로고
    • Signal transformation approach to fast nanopositioning
    • 10.1063/1.3160016 0034-6748 076101
    • Sebastian A and Moheimani S O R 2009 Signal transformation approach to fast nanopositioning Rev. Sci. Instrum. 80 076101
    • (2009) Rev. Sci. Instrum. , vol.80 , Issue.7
    • Sebastian, A.1    Moheimani, S.O.R.2
  • 22
    • 67349161030 scopus 로고    scopus 로고
    • Optimal periodic trajectories for band-limited systems
    • 10.1109/TCST.2008.2001375 1063-6536
    • Fleming A and Wills A 2009 Optimal periodic trajectories for band-limited systems IEEE Trans. Control Syst. Technol. 17 55262
    • (2009) IEEE Trans. Control Syst. Technol. , vol.17 , Issue.3 , pp. 552-562
    • Fleming, A.1    Wills, A.2
  • 23
    • 70349111518 scopus 로고    scopus 로고
    • Fast spiral-scan atomic force microscopy
    • 10.1088/0957-4484/20/36/365503 0957-4484 365503
    • Mahmood I and Moheimani S 2009 Fast spiral-scan atomic force microscopy Nanotechnology 20 365503
    • (2009) Nanotechnology , vol.20 , Issue.36
    • Mahmood, I.1    Moheimani, S.2
  • 24
    • 77649190281 scopus 로고    scopus 로고
    • Nanopositioning using the spiral of Archimedes: The probe-based storage case
    • 10.1016/j.mechatronics.2009.12.004 0957-4158
    • Kotsopoulos A and Antonakopoulos T 2010 Nanopositioning using the spiral of Archimedes: the probe-based storage case Mechatronics 20 27380
    • (2010) Mechatronics , vol.20 , Issue.2 , pp. 273-280
    • Kotsopoulos, A.1    Antonakopoulos, T.2
  • 25
    • 77957827881 scopus 로고    scopus 로고
    • High-speed cycloid-scan atomic force microscopy
    • 10.1088/0957-4484/21/36/365503 0957-4484 365503
    • Yong Y, Moheimani S O R and Petersen I 2010 High-speed cycloid-scan atomic force microscopy Nanotechnology 21 365503
    • (2010) Nanotechnology , vol.21 , Issue.36
    • Yong, Y.1    Moheimani, S.O.R.2    Petersen, I.3
  • 26
    • 0042025190 scopus 로고    scopus 로고
    • Single-shot MR imaging using trapezoidal-gradient-based lissajous trajectories
    • 10.1109/TMI.2003.815902 0278-0062
    • Feng H, Gu H, Silbersweig D, Stern E and Yang Y 2003 Single-shot MR imaging using trapezoidal-gradient-based lissajous trajectories IEEE Trans. Med. Imaging 22 92532
    • (2003) IEEE Trans. Med. Imaging , vol.22 , Issue.8 , pp. 925-932
    • Feng, H.1    Gu, H.2    Silbersweig, D.3    Stern, E.4    Yang, Y.5
  • 30
    • 33646767097 scopus 로고    scopus 로고
    • Magnetically engineered spintronic sensors and memory
    • 10.1109/JPROC.2003.811807 0018-9219
    • Parkin S, Jiang X, Kaiser C, Panchula A, Roche K and Samant M 2003 Magnetically engineered spintronic sensors and memory Proc. IEEE 91 66180
    • (2003) Proc. IEEE , vol.91 , Issue.5 , pp. 661-680
    • Parkin, S.1    Jiang, X.2    Kaiser, C.3    Panchula, A.4    Roche, K.5    Samant, M.6
  • 34
    • 49149106506 scopus 로고    scopus 로고
    • Modeling and experimental identification of silicon microheater dynamics: A systems approach
    • 10.1109/JMEMS.2008.926980 1057-7157
    • Sebastian A and Wiesmann D 2008 Modeling and experimental identification of silicon microheater dynamics: a systems approach J. Microelectromech. Syst. 17 91120
    • (2008) J. Microelectromech. Syst. , vol.17 , Issue.4 , pp. 911-920
    • Sebastian, A.1    Wiesmann, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.