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Volumn 22, Issue 13, 2011, Pages

Impulsive control for fast nanopositioning

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; CONTROLLER STATE; HIGH-SPEED; IMPULSIVE CONTROLS; LINEAR FEEDBACK CONTROLLERS; MEASUREMENT NOISE; NANO-POSITIONING; NON LINEAR CONTROL; TRACKING PERFORMANCE;

EID: 79952081287     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/13/135501     Document Type: Article
Times cited : (19)

References (21)
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  • 8
    • 17044388175 scopus 로고    scopus 로고
    • A mechanical microscope: High-speed atomic force microscopy
    • Humphris A D L, Miles M J and Hobbs J K 2005 A mechanical microscope: high-speed atomic force microscopy Appl. Phys. Lett. 86 034106
    • (2005) Appl. Phys. Lett. , vol.86 , Issue.3 , pp. 034106
    • Humphris, A.D.L.1    Miles, M.J.2    Hobbs, J.K.3
  • 9
    • 58149215919 scopus 로고    scopus 로고
    • Robust broadband nanopositioning: Fundamental trade-offs, analysis, and design in a two-degree-of-freedom control framework
    • Lee C and Salapaka S M 2009 Robust broadband nanopositioning: fundamental trade-offs, analysis, and design in a two-degree-of-freedom control framework Nanotechnology 20 035501
    • (2009) Nanotechnology , vol.20 , Issue.3 , pp. 035501
    • Lee, C.1    Salapaka, S.M.2
  • 11
    • 68949083234 scopus 로고    scopus 로고
    • Signal transformation approach to fast nanopositioning
    • Sebastian A and Moheimani S O R 2009 Signal transformation approach to fast nanopositioning Rev. Sci. Instrum. 80 076101
    • (2009) Rev. Sci. Instrum. , vol.80 , Issue.7 , pp. 076101
    • Sebastian, A.1    Moheimani, S.O.R.2
  • 14
    • 0002914180 scopus 로고
    • A nonlinear integrator for servomechanisms
    • Clegg J C 1958 A nonlinear integrator for servomechanisms Trans. AIEE II 77 41-2
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    • Clegg, J.C.1
  • 17
    • 27844552525 scopus 로고    scopus 로고
    • Resonant control of structural vibration using charge-driven piezoelectric actuators
    • DOI 10.1109/TCST.2005.857407
    • Moheimani S O R and Vautier B J G 2005 Resonant control of structural vibration using charge-driven piezoelectric actuators IEEE Trans. Control Syst. Technol. 13 1021-35 (Pubitemid 41638153)
    • (2005) IEEE Transactions on Control Systems Technology , vol.13 , Issue.6 , pp. 1021-1035
    • Moheimani, S.O.R.1    Vautier, B.J.C.2
  • 18
    • 32944468063 scopus 로고    scopus 로고
    • Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners
    • DOI 10.1109/TCST.2005.860511
    • Fleming A J and Moheimani S O R 2006 Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners IEEE Trans. Control Syst. Technol. 14 33-44 (Pubitemid 43256803)
    • (2006) IEEE Transactions on Control Systems Technology , vol.14 , Issue.1 , pp. 33-44
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 21
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    • Modeling and experimental identification of silicon microheater dynamics: A systems approach
    • Sebastian A and Wiesmann D 2008 Modeling and experimental identification of silicon microheater dynamics: a systems approach J. Microelectromech. Syst. 17 911-20
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    • Sebastian, A.1    Wiesmann, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.