Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner

IEEE/ASME Transactions on Mechatronics

Volumn 17, Issue 2, 2012, Pages 356-369

  Kenton, Brian J ^a   Leang, Kam K ^a  

^a University of Nevada   (United States)

Author keywords

Atomic force microscopy; compliant mechanisms; control systems; high speed electronics; nanopositioning; piezoelectric actuators; scanning probe microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPES; COMPLIANT MECHANISM; DESIGN AND CONTROL; DISCRETE-TIME; HIGH BANDWIDTH; HIGH-BANDWIDTH APPLICATION; HIGH-SPEED ELECTRONICS; HIGH-THROUGHPUT; LATERAL MOTION; LINE RATE; NANO-POSITIONER; NANO-POSITIONING; NANOPOSITIONING STAGE; OFF-AXIS; OPEN LOOPS; PARASITIC MOTION; PID FEEDBACK; PRECISION TRACKING; PROBE-BASED; REPETITIVE CONTROL; SCANNING PROBES; SLOW SCANNING; THREE-AXIS; VIDEO RATES; Z-DIRECTIONS;

ATOMIC FORCE MICROSCOPY; CONTROL SYSTEMS; FIELD PROGRAMMABLE GATE ARRAYS (FPGA); FINITE ELEMENT METHOD; KINEMATICS; MECHANISMS; PIEZOELECTRIC ACTUATORS; RESONANCE;

BANDWIDTH;

EID: 84856325637     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2011.2105499     Document Type: Article

References (32)

1. T. Ando, T. Uchihashi, and T. Fukuma, "High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes," Prog. Surf. Sci., vol. 83, nos. 7-9, pp. 337-437, 2008.
2. G. M. Clayton, S. Tien, K. K. Leang, Q. Zou, and S. Devasia, "A review of feedforward control approaches for nano precision positioning in high speed SPM operation," Trans. ASME, J. Dyn. Syst. Meas. Cont., vol. 131, pp. 061101-1-061101-19, 2009.
3. B. Bhikkaji, M. Ratnam, A. J. Fleming, and S. O. R. Moheimani, "Highperformance control of piezoelectric tube scanners," IEEE Trans. Contol Syst. Technol., vol. 15, no. 5, pp. 853-866, Sep. 2007.
4. G. Schitter and A. Stemmer, "Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy," IEEE Trans. Control Syst. Technol., vol. 12, no. 3, pp. 449-454, May 2004.
5. G. Schitter, W. F. Rijkee, and N. Phan, "Dual actuation for high-bandwidth nanopositioning," in Proc. IEEE Conf. Decision Control, Cancun, NM, 2008, pp. 5176-5181.
6. A. J. Fleming, "High-speed vertical positioning for contact-mode atomic force microscopy," in Proc. IEEE/ASME Int. Conf. Adv. Intell. Mechatron., Singapore, 2009, pp. 522-527.
7. O. M. E. Rifai and K. Youcef-Toumi, "Coupling in piezoelectric tube scanners used in scanning probe microscopes," in Proc. Amer. Control Conf., 2001, vol. 4, pp. 3251-3255. (Pubitemid 32837412)
8. M. J. Rost, L. Crama, P. Schakel, E. van Tol, G. B. E. M. van Velzen-Williams, C. F. Overgauw, H. ter Horst, H. Dekker, B. Okhuijsen, M. Seynen, A. Vijftigschild, P. Han, A. J. Katan, K. Schoots, R. Schumm, W. van Loo, T. H. Oosterkamp, and J. W. M. Frenken, "Scanning probe microscopes go video rate and beyond," Rev. Sci. Instrum., vol. 76, no. 5, pp. 053710-1-053710-9, 2005.
9. L. M. Picco, L. Bozec, A. Ulcinas, D. J. Engledew, M. Antognozzi, M. A. Horton, and M. J. Miles, "Breaking the speed limit with atomic force microscopy," Nanotechnology, vol. 18, no. 4, pp. 044030-1-044030-4, 2007.
10. F. E. Scire and E. C. Teague, "Piezodriven 50-μm range stage with subnanometer resolution," Rev. Sci. Instrum., vol. 49, no. 12, pp. 1735-1740, 1978. (Pubitemid 9087354)
11. K. K. Leang and A. J. Fleming, "High-speed serial-kinematic AFM scanner: Design and drive considerations," Asian J. Control, vol. 11, no. 2, pp. 144-153, 2009.
12. G. Schitter, P. J. Thurner, and P. K. Hansma, "Design and input-shaping control of a novel scanner for high-speed atomic force microscopy," Mechatronics, vol. 18, no. 5-6, pp. 282-288, 2008.
13. Y. K. Yong, S. S. Aphale, and S. O. R. Moheimani, "Design, identification, and control of a flexure-based xy stage for fast nanoscale positioning," IEEE Trans. Nanotechnol., vol. 8, no. 1, pp. 46-54, Jan. 2009.
14. Y. Li and Q. Xu, "A novel design and analysis of a 2-DOF compliant parallel micromanipulator for nanomanipulation," IEEE Trans. Autom. Sci. Eng., vol. 3, no. 3, pp. 248-254, Jul. 2006. (Pubitemid 44121555)
15. Y. Li and Q. Xu, "Design and analysis of a totally decoupled flexurebased XY parallel micromanipulator," IEEE Trans. Robot., vol. 25, no. 3, pp. 645-657, Jun. 2009.
16. J. H. Kindt, G. E. Fantner, J. A. Cutroni, and P. K. Hansma, "Rigid design of fast scanning probe microscopes using finite element analysis," Ultramicroscopy, vol. 100, nos. 3-4, pp. 259-265, 2004. (Pubitemid 38834134)
17. P. Gao, S. M. Swei, and Z. J. Yuan, "A new piezodriven precision micropositioning stage utilizing flexure hinges," Nanotechnol., vol. 10, no. 4, pp. 394-398, 1999. (Pubitemid 30523093)
18. S. P. Timoshenko, History of Strength of Materials. New York: McGraw-Hill, 1953.
19. N. Lobontiu, Compliant Mechanisms Design of Flexure Hinges. Boca Raton, FL: CRC Press, 2003.
20. R. R. J. Craig, Mechanics of Materials, 2nd ed. New York: Wiley, 2000.
21. W. C. Young and R. G. Budynas, Roark's Formulas for Stress and Strain, 7th ed. New York: McGraw-Hill, 2002.
22. S. R. Park and S. H. Yang, "A mathematical approach for analyzing ultra precision positioning system with compliant mechanism," J. Mater. Process. Technol., vol. 164-165, pp. 1584-1589, 2005. (Pubitemid 40584583)
23. Q. Xu and Y. Li, "Structure improvement of an XY flexure micromanipulator for micro/nano scale manipulation," in Proc. 17th World Congr. Int. Fed. Autom. Control (IFAC), 2008, vol. 17, pp. 12733-12738.
24. S. Awtar and A. H. Slocum, "Constraint-based design of parallel kinematic XY flexure mechanisms," J. Mech. Design, vol. 129, no. 8, pp. 816-830, 2007. (Pubitemid 47316487)
25. K. K. Leang, Q. Zou, and S. Devasia, "Feedforward control of piezoactuators in atomic force microscope systems: Inversion-based compensation for dynamics and hysteresis," IEEE Control Syst. Mag., vol. 29, no. 1, pp. 70-82, Feb. 2009.
26. A. J. Fleming and A. G. Wills, "Optimal periodic trajectories for bandlimited systems," IEEE Trans. Control Syst. Technol., vol. 13, no. 3, pp. 552-562, May 2009.
27. A. J. Fleming, "Nanopositioning system with force feedback for highperformance tracking and vibration control," IEEE/ASME Trans. Mechatronics, vol. 15, no. 3, pp. 421-432, Jun. 2010.
28. K. K. Leang and S. Devasia, "Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators," IEEE Trans. Control. Syst. Technol., vol. 15, no. 5, pp. 927-935, Sep. 2007.
29. T. Inoue, M. Nakano, and S. lwai, "High accuracy control of a proton synchrotron magnet power supply," in Proc. 8th IFAC World Congr., 1981, pp. 216-221.
30. M. Tomizuka, "Zero phase tracking algorithm for digital control," Trans. ASME, J. Dyn. Syst. Meas. Conttrol, vol. 109, pp. 65-68, 1987. (Pubitemid 17554850)
31. U. Aridogan, Y. Shan, and K. K. Leang, "Design and analysis of discretetime repetitive control for scanning probe microscopes," Trans. ASME, J. Dyn. Syst. Meas. Control., vol. 131, pp. 061103-1-061103-12, 2009.
32. Y. Shan and K. K. Leang, "Repetitive control with Prandtl-Ishlinskii hysteresis inverse for piezo-based nanopositioning," in Proc. Amer. Control Conf., St. Louis, MO, 2009, pp. 301-306.