Achieving subnanometer precision in a MEMS-based storage device during self-servo write process

IEEE Transactions on Nanotechnology

Volumn 7, Issue 5, 2008, Pages 586-595

  Sebastian, Abu ^a   Pantazi, Angeliki ^a   Reza Moheimani, S O ^b   Pozidis, Haris ^a   Eleftheriou, Evangelos ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

H controllers; Nanopositioning; Precision positioning; Probe based data storage; Resonant controllers; Servo write process

Indexed keywords

ACOUSTIC NOISE; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; ERROR ANALYSIS; MEMS; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS; SENSOR NETWORKS; SENSORS; TRANSFER FUNCTIONS;

NANOPOSITIONING; PRECISION POSITIONING; PROBE-BASED DATA STORAGE; RESONANT CONTROLLERS; SERVO WRITE PROCESS;

DATA STORAGE EQUIPMENT;

EID: 53349099502     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2008.926441     Document Type: Article

References (17)

1. E. Eleftheriou, T. Antonakopoulos, G. K. Binnig, G. Cherubini, M. Despont, A. Dholakia, U. Dürig, M. A. Lantz, H. Pozidis, H. E. Rothuizen, and P. Vettiger, "Millipede-a MEMS based scanning-probe data storage system," IEEE Trans. Magn., vol. 39, no. 2, pp. 938-945, Mar. 2003.
2. P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, M. Lantz, H. Rothuizen, R. Stutz, and G. Binnig, "The 'millipede' - nanotechnology entering data storage," IEEE Trans. Nanotechnol., vol. 1, no. 1, pp. 39-55, Mar. 2002.
3. A. Pantazi, A. Sebastian, T. Antonakopoulos, P. Bächtold, T. Bonaccio, J. Bonan, G. Cherubini, M. Despont, R. A. Dipietro, U. Drechsler, U. Dürig, W. Häberle, C. Hagleitner, J. L. Hedrick, D. Jubin, A. Knoll, M. A. Lantz, J. Pentarakis, H. Pozidis, R. C. Pratt, H. Rothuizen, R. Stutz, M. Varsamou, D. Wiesmann, and E. Eleftheriou, "Probe-based ultra-high density storage technology," IBM J. Res. Dev., vol. 52, no. 4/5, 2008.
4. 2," IEEE Trans. Magn., vol. 40, no. 4, pp. 2531-2536, Jul. 2004.
5. M. A. Lantz, H. Rothuizen, U. Drechsler, W. Haeberle, and M. Despont, "A vibration resistant nanopositioner for mobile parallel-probe storage applications," J. Microelectromech. Syst., vol. 16, no. 1, pp. 130-139, Feb. 2007.
6. M. A. Lantz, G. K. Binnig, M. Despont, and U. Drechsler, "A micromechanical thermal displacement sensor with nanometer resolution," Nanotechnology, vol. 16, pp. 1089-1094, May 2005.
7. A. Pantazi, A. Sebastian, G. Cherubini, M. Lantz, H. Pozidis, H. Rothuizen, and E. Eleftheriou, "Control of MEMS-based scanningprobe data-storage devices," IEEE Trans. Control Syst. Technol., vol. 15, no. 5, pp. 824-841, Sep. 2007.
8. A. Al Mamun, G. Guo, and B. Chao, Hard Disk Drive : Mechatronics and Control, 1st ed. Boca Raton, FL: CRC, 2006.
9. A. Sebastian and D. Wiesmann, "Modeling and experimental identification of silicon microheater dynamics: A systems approach," J. Microelectromech. Syst., vol. 17, no. 4, pp. 911-920, Aug. 2008.
10. A. Sebastian and S. Salapaka, "Design methodologies for robust nanopositioning," IEEE Trans. Control Syst. Technol., vol. 13, no. 6, pp. 868-876, Nov. 2005.
11. S. Skogestad and I. Postlethwaite, Multivariable Feedback Control: Analysis and Design, 2nd ed. New York: Wiley/Interscience, 2005.
12. J. L. Fanson and T. K. Caughey, "Positive position feedback-control for large space structures," AIAA J., vol. 28, no. 4, pp. 717-724, Apr. 1990.
13. B. Bhikkaji, M. Ratnam, and S. O. R. Moheimani, "PVPF control of piezoelectric tube scanners," Sens. Actuators A, Phys., vol. 135, no. 2, pp. 700-712, Apr. 2007.
14. S. O. R. Moheimani and B. J. G. Vautier, "Resonant control of structural vibration using charge-driven piezoelectric actuators," IEEE Trans. Control Syst. Technol., vol. 13, no. 6, pp. 1021-1035, Nov. 2005.
15. D. Halim and S. O. R. Moheimani, "Spatial resonant control of flexible structures-application to a piezoelectric laminate beam," IEEE Trans. Control Syst. Technol., vol. 9, no. 1, pp. 37-53, Jan. 2001.
16. A. Sebastian, A. Pantazi, and H. Pozidis, "Jitter investigation and performance evaluation of a small-scale probe storage device prototype," in Proc. IEEE Global Commun. Conf., Washington, DC, Nov. 26-30, 2007, pp. 288-293.
17. ∞ control for nanopositioning in probe storage," in Proc. IEEE Conf. Decis. Control, Seville, Spain, Dec. 12-15, 2005, pp. 1174-1179.