High-bandwidth nanopositioner with magnetoresistance based position sensing

Mechatronics

Volumn 22, Issue 3, 2012, Pages 295-301

  Kartik, Venkataraman ^a,b   Sebastian, Abu ^a   Tuma, Tomas ^a   Pantazi, Angeliki ^a   Pozidis, Haralampos ^a   Sahoo, Deepak R ^a,c  

^a IBM RESEARCH ZURICH   (Switzerland)

^b INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^c UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Atomic force microscopy; H Control; Magnetoresistance sensors; Nanopositioning; Scanners

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETORESISTANCE; NANOTECHNOLOGY; NATURAL FREQUENCIES; SCANNING;

CLOSED-LOOP OPERATION; ENABLING TECHNOLOGIES; MAGNETORESISTANCE SENSORS; MECHANICAL CONNECTIONS; NANO-POSITIONING; NANOPOSITIONING SYSTEMS; NANOSCALE METROLOGIES; SCANNERS;

BANDWIDTH;

EID: 84860129726     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2011.07.009     Document Type: Article

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