Robust broadband nanopositioning: Fundamental trade-offs, analysis, and design in a two-degree-of-freedom control framework

Nanotechnology

Volumn 20, Issue 3, 2009, Pages

  Lee, Chibum ^a   Salapaka, Srinivasa M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMERCE; DESIGN; FEEDBACK; FEEDBACK CONTROL; ROBUST CONTROL; ROBUSTNESS (CONTROL SYSTEMS); TELECOMMUNICATION SYSTEMS; UNCERTAINTY ANALYSIS;

ALGEBRAIC CONSTRAINTS; ARCHITECTURAL CONSTRAINTS; CONTROL DESIGNS; CONTROL FRAMEWORKS; FEEDBACK CONTROLLERS; FEEDFORWARD AND FEEDBACK CONTROLS; FEEDFORWARD COMPONENTS; MIXED SENSITIVITIES; MODELING UNCERTAINTIES; NANOPOSITIONING; NANOPOSITIONING SYSTEMS; OPTIMAL CONTROLS; OPTIMAL FEEDBACKS; PERFORMANCE OBJECTIVES; PERFORMANCE SPECIFICATIONS; PREFILTER; ROBUST MODELS;

CONTROL THEORY;

ARTICLE; FEEDBACK SYSTEM; MODEL; NANOANALYSIS; NANODEVICE; NANOFILTER; NANOTECHNOLOGY; PRIORITY JOURNAL; SENSITIVITY AND SPECIFICITY;

EID: 58149215919     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/3/035501     Document Type: Article

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