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Volumn 80, Issue 7, 2009, Pages

Signal transformation approach to fast nanopositioning

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOPS; ENABLING TOOLS; EXTERNAL DISTURBANCES; HIGH BANDWIDTH; HIGH FREQUENCY; HIGH RESOLUTION; HIGH-PRECISION; JITTER-FREE; MEASUREMENT NOISE; NANO-POSITIONER; NANO-POSITIONING; OPEN LOOPS; REDUCED RESOLUTION; REFERENCE SIGNALS; SIGNAL TRANSFORMATION;

EID: 68949083234     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3160016     Document Type: Article
Times cited : (25)

References (11)
  • 1
    • 34547729099 scopus 로고    scopus 로고
    • Precision positioning of wafer scanners: Segmented iterative learning control for nonrepetitive disturbances [Applications of control]
    • DOI 10.1109/MCS.2007.384130
    • S. Mishra, J. Coaplen, and M. Tomizuka, IEEE Control Syst. Mag. 0272-1708 27, 20 (2007). 10.1109/MCS.2007.384130 (Pubitemid 47225412)
    • (2007) IEEE Control Systems Magazine , vol.27 , Issue.4 , pp. 20-25
    • Mishra, S.1    Coaplen, J.2    Tomizuka, M.3
  • 6
    • 68949084228 scopus 로고    scopus 로고
    • Proceedings of the IFAC World Congress, Seoul, Korea, (unpublished)
    • A. Fleming and A. G. Wills, Proceedings of the IFAC World Congress, Seoul, Korea, 2008 (unpublished), pp. 11805-11810.
    • (2008) , pp. 11805-11810
    • Fleming, A.1    Wills, A.G.2
  • 10
    • 32944468063 scopus 로고    scopus 로고
    • Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners
    • DOI 10.1109/TCST.2005.860511
    • A. J. Fleming and S. O. R. Moheimani, IEEE Trans. Control Syst. Technol. 1063-6536 14, 33 (2006). 10.1109/TCST.2005.860511 (Pubitemid 43256803)
    • (2006) IEEE Transactions on Control Systems Technology , vol.14 , Issue.1 , pp. 33-44
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 11
    • 22944475297 scopus 로고    scopus 로고
    • A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanners
    • DOI 10.1063/1.1938952, 073707
    • A. J. Fleming and S. O. R. Moheimani, Rev. Sci. Instrum. 0034-6748 76, 073707 (2005). 10.1063/1.1938952 (Pubitemid 41049140)
    • (2005) Review of Scientific Instruments , vol.76 , Issue.7 , pp. 1-5
    • Fleming, A.J.1    Moheimani, S.O.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.