A vibration resistant nanopositioner for mobile parallel-probe storage applications

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 130-139

  Lantz, Mark A ^a   Rothuizen, Hugo E ^a   Drechsler, Ute ^a   Häberle, Walter ^a   Despont, Michel ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Actuators; Atomic force microscopy; Microelectromechanical devices; Motion control; Motors

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROACTUATORS; MOTION CONTROL; NANOPROBES; NEMS; SILICON WAFERS; VIBRATION CONTROL;

LINEAR SHOCK; NANOPOSITIONER; PARALLEL-PROBE STORAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 33947227328     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.886032     Document Type: Article

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