Modeling and experimental identification of silicon microheater dynamics: A systems approach

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 911-920

  Sebastian, Abu ^a   Wiesmann, Dorothea ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Microcantilevers; Microheaters; Nanoscale position sensors; Thermal analysis; Thermal sensing; Thermal transport; Topography sensing

Indexed keywords

CONFORMAL MAPPING; DATA STORAGE EQUIPMENT; DYNAMIC RESPONSE; DYNAMICS; ELECTRIC HEATING; ELECTRIC HEATING ELEMENTS; ELECTRIC LOAD FORECASTING; HEATING; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; NONMETALS; SENSORS; SILICON;

ARBITRARY TEMPERATURE; DATA STORAGE; DESIGN AND OPERATION; ELECTRICAL POWER; ELECTRICAL RESISTANCES; ELECTRICAL RESPONSES; EXPERIMENTAL IDENTIFICATION; EXTENDED MODEL; FEEDBACK MODELS; LOCALIZED HEATING; MICRO SCANNERS; MICROCANTILEVERS; MICROHEATERS; NANO SCALING; NANOSCALE POSITION SENSORS; POSITION SENSORS; PROBE-BASED; SILICON CANTILEVERS; SYSTEMS APPROACH; THERMAL ANALYSIS; THERMAL SENSING; THERMAL TRANSPORT; TOPOGRAPHY SENSING;

MATHEMATICAL OPERATORS;

EID: 49149106506     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.926980     Document Type: Article

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