The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal

Journal of Applied Physics

Volumn 111, Issue 5, 2012, Pages

  Hess, Peter ^a  

^a UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AB INITIO CALCULATIONS; CARBON ATOMS; CHEMICAL VAPOR DEPOSITION DIAMOND; CRITICAL STRESS; CUBIC LATTICE; CVD DIAMOND; DEPOSITION CONDITIONS; DIAMOND LATTICES; DIAMOND MATERIALS; FINITE CRACKS; FRACTURE BEHAVIOR; FRACTURE MECHANISMS; FRACTURE STRESS; FREESTANDING FILMS; HETEROEPITAXIAL; IDEAL VALUES; IMPURITY LEVEL; LASER ULTRASONICS; LASER-BASED TECHNIQUES; LINEAR ELASTIC; MECHANICAL FAILURES; MECHANISTIC STUDIES; NANOCRYSTALLINES; NONLINEAR SURFACE; OPTIMIZED DEPOSITION CONDITIONS; ORDERS OF MAGNITUDE; SEMI-QUANTITATIVE; SHOCK FRONTS; SINGLE CRYSTAL DIAMOND; SINGLE CRYSTAL SILICON; STRESS COMPONENT; STRONGLY CONNECTED; ULTRASONIC METHODS; UNIQUE FEATURES; VOLUME CHANGE; YOUNG'S MODULUS;

ACOUSTIC SURFACE WAVE DEVICES; CHEMICAL VAPOR DEPOSITION; CRACK TIPS; CRYSTAL IMPURITIES; CRYSTAL LATTICES; DIAMOND FILMS; ELASTIC MODULI; ELASTICITY; ELECTRONIC PROPERTIES; EPITAXIAL GROWTH; HARDNESS; SINGLE CRYSTALS; SYNTHETIC DIAMONDS; ULTRASONIC TESTING; VAPORS;

FRACTURE;

EID: 84858980171     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3683544     Document Type: Review

References (110)

1. J. J. Gilman, Mater. Res. Soc. Symp. Proc. 383, 281 (1995). 10.1557/PROC-383-281
2. J. J. Gilman, Mater. Res. Innovations 6, 112 (2002). 10.1007/s10019-002- 0196-0
3. J. E. Field, EMIS Datareviews Series, INSPEC 9, 36 (1994).
4. J. B. Cui, K. Amtmann, J. Ristein, and L. Ley, J. Appl. Phys. 83, 7929 (1998). 10.1063/1.367972
5. R. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, P. N. Inglis, T. D. Madgwick, M. L. Markham, T. P. Mollart, N. Perkins, G. A. Scarsbrook, D. J. Twitchen, A. J. Whitehead, J. J. Wilman, and S. M. Woollard, J. Phys.: Condens. Matter 21, 364221 (2009). 10.1088/0953-8984/21/ 36/364221
6. J. J. Gracio, Q. H. Fan, and J. C. Madaleno, J. Phys. D: Appl. Phys. 43, 374017 (2010). 10.1088/0022-3727/43/37/374017
7. J. E. Butler, Y. A. Mankelevich, A. Cheesman, J. Ma, and M. N. R. Ashfold, J. Phys.: Condens. Matter 21, 364201 (2009). 10.1088/0953-8984/21/36/ 364201
8. P. M. Martineau, M. P. Gaukroger, K. B. Guy, S. C. Lawson, D. J. Twitchen, I. Friel, J. O. Hansen, G. C. Summerton, T. P. G. Addison, and R. Burns, J. Phys.: Condens. Matter 21, 364205 (2009). 10.1088/0953-8984/21/36/ 364205
9. M. Schreck, F. Hörmann, H. Roll, J. K. N. Lindner, and B. Stritzker, Appl. Phys. Lett. 78, 192 (2001). 10.1063/1.1337648
10. M. Schreck, S. Gsell, R. Brescia, M. Fischer, P. Bernhard, P. Prunici, P. Hess, and B. Stritzker, Diamond Relat. Mater. 18, 107 (2009). 10.1016/j.diamond.2008.08.013
11. O. A. Williams, Diamond Relat. Mater. 20, 621 (2011). 10.1016/j.diamond.2011.02.015
12. A. Migliori, H. Ledbetter, R. G. Leisure, C. Pantea, and J. B. Betts, J. Appl. Phys. 104, 053512 (2008). 10.1063/1.2975190
13. X. Luo, Z. Liu, B. Xu, D. Yu, Y. Tian, H.-T. Wang, and J. He, J. Phys. Chem. 114, 17851 (2010).
14. H. J. McSkimin and W. L. Bond, Phys. Rev. 105, 116 (1957). 10.1103/PhysRev.105.116
15. H. J. McSkimin and P. Andreatch, Jr., J. Appl. Phys. 43, 2944 (1972). 10.1063/1.1661636
16. A. M. Lomonosov, A. P. Mayer, and P. Hess, in Modern Acoustical Techniques for the Measurement of Mechanical Properties, edited by, M. Levy, H. E. Bass, R. Stern, (Academic, Boston, 2001), Vol. 39, pp. 65-134.
17. J. A. Rogers and K. A. Nelson, J. Appl. Phys. 75, 1534 (1994). 10.1063/1.356998
18. H. Coufal, R. Grygier, P. Hess, and A. Neubrand, J. Acoust. Soc. Am. 92, 2980 (1992). 10.1121/1.404363
19. Z. H. Shen, A. M. Lomonosov, P. Hess, M. Fischer, S. Gsell, and M. Schreck, J. Appl. Phys. 108, 083524 (2010). 10.1063/1.3493245
20. R. Kuschnereit, P. Hess, D. Albert, and W. Kulisch, Thin Solid Films 312, 66 (1998). 10.1016/S0040-6090(97)00582-8
21. P. Hess, Proc. SPIE 4703, 1 (2002). 10.1117/12.469610
22. R. G. Leisure and F. A. Willis, J. Phys.: Condens. Matter 9, 6001 (1997). 10.1088/0953-8984/9/28/002
23. N. Nakamura, H. Ogi, and M. Hirao, Acta Mater. 52, 765 (2004). 10.1016/j.actamat.2003.10.012
24. M. Grimsditch and A. K. Ramdas, Phys. Rev. B 11, 3139 (1975). 10.1103/PhysRevB.11.3139
25. R. Vogelgesang, A. K. Ramdas, S. Rodriguez, M. Grimsditch, and T. Anthony, Phys. Rev. B 54, 3989 (1996). 10.1103/PhysRevB.54.3989
26. P. Djemia, A. Tallaire, J. Achard, F. Silva, and A. Gicquel, Diamond Relat. Mater. 16, 962 (2007). 10.1016/j.diamond.2006.11.029
27. P. Djemia, C. Dugautier, T. Chauveau, E. Dogheche, M. I. De Barros, and L. Vandenbulcke, J. Appl. Phys. 90, 3771 (2001). 10.1063/1.1402667
28. R. H. Lacombe, Adhesion Measurement Methods: Theory and Practice (CRC, Boca Raton, FL, 2006).
29. J. E. Field and C. S. J. Pickles, Diamond Relat. Mater. 5, 625 (1996). 10.1016/0925-9635(95)00362-2
30. S. Chowdhury, E. de Barra, and M. T. Laugier, Surf. Coat. Technol. 193, 200 (2005). 10.1016/j.surfcoat.2004.08.131
31. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 23 (1992). 10.1557/JMR.1992.1564
32. C. S. J. Pickles, Diamond Relat. Mater. 11, 1913 (2002). 10.1016/S0925-9635(02)00197-8
33. A. R. Davies, J. E. Field, and C. S. J. Pickles, Philos. Mag. 83, 4059 (2004). 10.1080/14786430310001613246
34. R. Ramakrishnan, M. A. Lodes, S. M. Rosiwal, and R. F. Singer, Acta Mater. 59, 3343 (2011). 10.1016/j.actamat.2011.02.009
35. A. R. Davies, J. E. Field, K. Takahashi, and K. Hade, J. Mater. Sci. 39, 1571 (2004). 10.1023/B:JMSC.0000016153.90600.a6
36. H. D. Espinosa, B. C. Prorok, B. Peng, K. H. Kim, N. Moldovan, O. Auciello, J. A. Carlisle, D. M. Gruen, and D. C. Mancini, Exp. Mech. 43, 256 (2003). 10.1007/BF02410524
37. H. D. Espinosa, B. Peng, B. C. Prorok, N. Moldovan, O. Auciello, J. A. Carlisle, D. M. Gruen, and D. C. Marcini, J. Appl. Phys. 94, 6076 (2003). 10.1063/1.1613372
38. C. A. Klein, J. Appl. Phys. 97, 016105 (2005). 10.1063/1.1826211
39. P. Hess, Phys. Today 55, 42 (2002). 10.1063/1.1472393
40. A. M. Lomonosov and P. Hess, Phys. Rev. Lett. 89, 095501 (2002). 10.1103/PhysRevLett.89.095501
41. D. G. Clerc and H. Ledbetter, J. Phys. Chem. Solids 66, 1589 (2005). 10.1016/j.jpcs.2005.05.075
42. Y. Umeno and M. Cern, Phys. Rev. B 77, 10010 (2008). 10.1103/PhysRevB.77. 100101
43. C. A. Klein and G. F. Cardinale, Diamond Relat. Mater. 2, 918 (1993). 10.1016/0925-9635(93)90250-6
44. J. M. Lang and Y. M. Gupta, Phys. Rev. Lett. 106, 125502 (2011). 10.1103/PhysRevLett.106.125502
45. X. Jiang, J. V. Harzer, B. Hillebrands, Ch. Wild, and P. Koidl, Appl. Phys. Lett. 59, 1055 (1991). 10.1063/1.106343
46. L. Bruno, L. Pagnotta, and A. Poggialini, J. Eur. Ceram. Soc. 26, 2419 (2006). 10.1016/j.jeurceramsoc.2005.04.008
47. P. H. Mott and C. M. Roland, Phys. Rev. B 80, 132104 (2009). 10.1103/PhysRevB.80.132104
48. G. Lehmann, M. Schreck, L. Hou, J. Lambers, and P. Hess, Diamond Relat. Mater. 10, 686 (2001). 10.1016/S0925-9635(00)00410-6
49. Z. H. Shen, P. Hess, J. P. Huang, Y. C. Lin, K. H. Chen, L. C. Chen, and S. T. Lin, J. Appl. Phys. 99, 124303 (2006). 10.1063/1.2205352
50. T. J. Valentine, A. J. Whitehead, R. S. Sussmann, C. J. H. Wort, and G. A. Scarsbrook, Diamond Relat. Mater. 3, 1168 (1994). 10.1016/0925-9635(94)90163- 5
51. D. K. Reinhard, T. A. Grotjohn, M. Becker, M. K. Yaran, T. Schuelke, and J. Asmussen, J. Vac. Sci. Technol. B 22, 2811 (2004). 10.1116/1.1819928
52. S.-F. Wang, Y.-F. Hsu, J.-C. Pu, J. C. Sung, and L. G. Hwa, Mater. Chem. Phys. 85, 432 (2004). 10.1016/j.matchemphys.2004.02.003
53. M. A. Nitti, G. Cicala, R. Brescia, A. Romeo, J. B. Guion, G. Perna, and V. Capozzi, Diamond Relat. Mater. 20, 221 (2011). 10.1016/j.diamond.2010.12.002
54. S. Chowdhury, E. de Barra, and M. T. Laugier, Diamond Relat. Mater. 13, 1625 (2004). 10.1016/j.diamond.2004.01.011
55. A. Kant, M. D. Drory, N. R. Moody, W. J. Moberlychan, J. W. Ager III, and R. O. Ritchie, Mater. Res. Symp. Proc. 505, 611 (1998). 10.1557/PROC-505-611
56. J. Hu, Y. K. Chou, R. G. Thompson, J. Burgess, and S. Street, Surf. Coat. Technol. 202, 1113 (2007). 10.1016/j.surfcoat.2007.07.050
57. M. Wiora, K. Brühne, A. Flöter, P. Gluche, T. M. Willey, S. O. Kucheyev, A. W. Van Buuren, A. V. Hamza, J. Biener, and H.-J. Fecht, Diamond Relat. Mater. 18, 927 (2009). 10.1016/j.diamond.2008.11.026
58. R. Ikeda, H. Tanei, N. Nakamura, H. Ogi, M. Hirao, A. Sawabe, and M. Takemoto, Diamond Relat. Mater. 15, 729 (2006). 10.1016/j.diamond.2005.10.031
59. H. Tanei, N. Nakamura, H. Ogi, and M. Hirao, Phys. Rev. Lett. 100, 016804 (2008). 10.1103/PhysRevLett.100.016804
60. H. Tanei, K. Tanigaki, K. Kusakabe, H. Ogi, N. Nakamura, and M. Hirao, Appl. Phys. Lett. 94, 041914 (2009). 10.1063/1.3077124
61. O. A. Williams, A. Kriele, J. Hees, M. Wolfer, W. Müller-Sebert, and C. E. Nebel, Chem. Phys. Lett. 495, 84 (2010). 10.1016/j.cplett.2010.06.054
62. J. Philip, P. Hess, T. Feygelson, J. E. Butler, S. Chattopadhyay, K. H. Chen, and L. C. Chen, J. Appl. Phys. 93, 2164 (2003). 10.1063/1.1537465
63. S. O. Kucheyev, J. Biener, J. W. Tringe, Y. M. Wang, P. B. Mirkarimi, T. van Buuren, S. L. Baker, and A. V. Hamza, Appl. Phys. Lett. 86, 221914 (2005). 10.1063/1.1943492
64. A. Kriele, O. A. Williams, M. Wolfer, D. Brink, W. Müller-Sebert, and C. E. Nebel, Appl. Phys. Lett. 95, 031905 (2009). 10.1063/1.3183534
65. C. J. Tang, S. M. S. Pereira, A. J. S. Fernandes, A. J. Neves, J. Grcio, I. K. Bdikin, M. R. Soares, L. S. Fu, L. P. Gu, A. L. Khokin, and M. C. Carmo, J. Cryst. Growth 311, 2258 (2009). 10.1016/j.jcrysgro.2009.01.130
66. D. M. Gruen, S. Liu, A. R. Krauss, J. Luo, and X. Pan, Appl. Phys. Lett. 64, 1502 (1994). 10.1063/1.111872
67. D. M. Gruen, S. Liu, A. R. Krauss, and X. Pan, J. Appl. Phys. 75, 1758 (1994). 10.1063/1.356367
68. Y. C. Lee, S. J. Lin, V. Buck, R. Kunze, H. Schmidt, C. Y. Lin, W. L. Fang, and I. N. Lin, Diamond Relat. Mater. 17, 446 (2008). 10.1016/j.diamond. 2007.08.025
69. S. A. Catledge and Y. K. Vohra, J. Appl. Phys. 84, 6469 (1998). 10.1063/1.368975
70. W. Kulisch, C. Popov, S. Boycheva, L. Buforn, G. Favaro, and N. Conte, Diamond Relat. Mater. 13, 1997 (2004). 10.1016/j.diamond.2004.04.002
71. B. Peng, C. Li, N. Moldovan, H. D. Espinosa, X. Xiao, O. Auciello, and J. A. Carlisle, J. Mater. Res. 22, 913 (2007). 10.1557/jmr.2007.0137
72. N. N. Naguib, J. W. Elam, J. Birrell, J. Wang, D. S. Grierson, B. Kabius, J. M. Hiller, A. V. Sumant, R. W. Carpick, O. Auciello, and J. A. Carlisle, Chem. Phys. Lett. 430, 345 (2006). 10.1016/j.cplett.2006.08.137
73. J. S. Tse, J. Superhard Mater. 32, 177 (2010). 10.3103/S1063457610030044
74. B. R. Lawn, J. Mater. Res. 19, 22 (2004). 10.1557/jmr.2004.19.1.22
75. E. van der Giessen and A. Needleman, Annu. Rev. Mater. Res. 32, 141 (2002). 10.1146/annurev.matsci.32.120301.102157
76. M. Marder and J. Fineberg, Phys. Today 49, 24 (1996). 10.1063/1.881515
77. R. H. Telling, C. J. Pickard, M. C. Payne, and J. E. Field, Phys. Rev. Lett. 84, 5160 (2000). 10.1103/PhysRevLett.84.5160
78. D. Roundy and M. L. Cohen, Phys. Rev. B 64, 212103 (2001). 10.1103/PhysRevB.64.212103
79. Y. Zhang, H. Sun, and C. Chen, Phys. Rev. Lett. 94, 145505 (2005). 10.1103/PhysRevLett.94.145505
80. Y. Umeno, Mater. Res. Soc. Symp. Proc. 1086, 1086-U07-03 (2008). 10.1557/PROC-1086-U07-03
81. Q. Liang, C. Yan, Y. Meng, J. Lai, S. Krasnicki, H. Mao, and R. J. Hemley, Diamond Relat. Mater. 18, 698 (2009). 10.1016/j.diamond.2008.12.002
82. Q. Liang, C. Yan, Y. Meng, J. Lai, S. Krasnicki, H. Mao, and R. J. Hemley, J. Phys.: Condens. Matter 21, 364215 (2009). 10.1088/0953-8984/21/36/ 364215
83. C. S. Yan, H. K. Mao, W. Li, J. Qian, Y. Zhao, and R. J. Hemley, Phys. Status Solidi A 201, R25 (2004). 10.1002/pssa.v201:4
84. N. V. Novikov and S. N. Dub, Diamond Relat. Mater. 5, 1026 (1996). 10.1016/0925-9635(95)00346-0
85. M. D. Drory, R. H. Dauskardt, A. Kant, and R. O. Ritchie, J. Appl. Phys. 78, 3083 (1995). 10.1063/1.360060
86. R. S. Sussmann, J. R. Brandon, G. A. Scarsbrook, C. G. Sweeney, T. J. Valentine, A. J. Whitehead, and C. J. H. Wort, Diamond Relat. Mater. 3, 303 (1994). 10.1016/0925-9635(94)90176-7
87. A. Kant, M. D. Drory, and R. O. Ritchie, Mater. Res. Soc. Symp. Proc. 383, 289 (1995). 10.1557/PROC-383-289
88. Z. Xia, W. A. Curtin, and B. W. Sheldon, Acta Mater. 52, 3507 (2004). 10.1016/j.actamat.2004.04.004
89. F. X. Lu, Z. Jiang, W. Z. Tang, T. B. Huang, and J. M. Liu, Diamond Relat. Mater. 10, 770 (2001). 10.1016/S0925-9635(00)00523-9
90. A. R. Davies, J. E. Field, K. Takahashi, and K. Hada, Diamond Relat. Mater. 14, 6 (2005). 10.1016/j.diamond.2004.06.015
91. G. F. Cardinale and C. J. Robinson, J. Mater. Res. 7, 1432 (1992). 10.1557/JMR.1992.1432
92. D. S. Olson, G. J. Reynolds, G. F. Virshup, F. I. Friedlander, B. G. James, and L. D. Partain, J. Appl. Phys. 78, 5177 (1995). 10.1063/1.359752
93. S. E. Coe and R. S. Sussmann, Diamond Relat. Mater. 9, 1726 (2000). 10.1016/S0925-9635(00)00298-3
94. T. E. Steyer, K. T. Faber, and M. D. Drory, Appl. Phys. Lett. 66, 3105 (1995). 10.1063/1.113617
95. J. E. Field, in Properties of Diamond, edited by, J. E. Field, (Academic, London, 1992), pp. 286-310.
96. R. Ikeda, H. Cho, M. Takamoto, and K. Ono, J. Acoust. Emission 22, 119 (2004).
97. R. Ikeda, M. Hayashi, A. Yonezu, H. Cho, T. Ogawa, and M. Takemoto, Trans. Jpn. Soc. Mech. Eng., Ser. A 73, 57 (2007). 10.1299/kikaia.73.57
98. W. B. Yang, F. X. Lü, and Z. X. Cao, J. Appl. Phys. 91, 10068 (2002). 10.1063/1.1479476
99. Y. Hayashi and T. Soga, Tribol. Int. 37, 965 (2004). 10.1016/j.triboint. 2004.07.014
100. M.-S. You, F. C.-N. Hong, Y.-R. Jeng, and S.-M. Huang, Diamond Relat. Mater. 18, 155 (2009). 10.1016/j.diamond.2008.07.015
101. A. R. Kraus, O. Auciello, D. M. Gruen, A. Jayatissa, A. Sumant, J. Tucek, D. C. Mancini, N. Moldovan, A. Erdemir, D. Ersoy, M. N. Gardos, H. G. Busmann, E. M. Meyer, and M. Q. Ding, Diamond Relat. Mater. 10, 1952 (2001). 10.1016/S0925-9635(01)00385-5
102. M. Karskov, L. Zajkov, V. Burkov, D. Franta, D. Neas, O. Blhov, and J. perka, Surf. Coat. Technol. 204, 1997 (2010). 10.1016/j.surfcoat.2009.09.017
103. H. Yoshikawa, C. Morel, and Y. Koga, Diamond Relat. Mater. 10, 1588 (2001). 10.1016/S0925-9635(01)00414-9
104. H. D. Espinosa, B. Peng, N. Moldovan, T. A. Friedmann, X. Xiao, D. C. Mancini, O. Auciello, J. Carlisle, C. A. Zorman, and M. Merhegany, Appl. Phys. Lett. 89, 073111 (2006). 10.1063/1.2336220
105. O. Auciello, J. Birrell, J. A. Carlisle, J. E. Gerbi, X. Xiao, B. Peng, and H. D. Espinosa, J. Phys.: Condens. Matter 16, R539 (2004). 10.1088/0953-8984/16/16/R02
106. F. J. Hernandez Guillen, K. Janischowsky, W. Ebert, and E. Kohn, Phys. Status Solidi A 201, 2553 (2004). 10.1002/pssa.v201:11
107. F. J. Hernandez Guillen, K. Janischowsky, J. Kusterer, W. Ebert, and E. Kohn, Diamond Relat. Mater. 14, 411 (2005). 10.1016/j.diamond.2004.12.061
108. O. Auciello and A. V. Sumant, Diamond Relat. Mater. 19, 699 (2010). 10.1016/j.diamond.2010.03.015
109. V. Brazhkin, N. Dubrovinskaia, M. Nicol, N. Novikov, R. Riedel, V. Solozhenko, and Y. Zhao, Nature Mater. 3, 576 (2004). 10.1038/nmat1196
110. P. Hess, Diamond Relat. Mater. 18, 186 (2009). 10.1016/j.diamond.2008.10. 005