Density and elastic constants of hot-filament-deposited polycrystalline diamond films: Methane concentration dependence

Thin Solid Films

Volumn 312, Issue 1-2, 1998, Pages 66-72

  Kuschnereit, R ^a   Hess, P ^a   Albert, D ^b   Kulisch, W ^b  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b UNIVERSITY OF KASSEL   (Germany)

Author keywords

Chemical vapour deposition (CVD); Diamond; Elastic properties; Laser irradiation

Indexed keywords

ACOUSTIC DISPERSION; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; ELASTIC MODULI; LASER BEAM EFFECTS; METHANE; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

HOT FILAMENT TECHNIQUE; POISSON'S RATIO; SURFACE ACOUSTIC WAVE SPECTROSCOPY (SAWS); SURFACE WAVE PULSES;

DIAMOND FILMS;

EID: 0031648283     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00582-8     Document Type: Article

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