Multimode photoacoustic method for the evaluation of mechanical properties of heteroepitaxial diamond layers

Journal of Applied Physics

Volumn 108, Issue 8, 2010, Pages

  Shen, Zhonghua H ^a,b   Lomonosov, Alexey M ^a,c   Hess, Peter ^a   Fischer, Martin ^d   Gsell, Stefan ^d   Schreck, Matthias ^d  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^c PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^d UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MODE; ANISOTROPIC LAYERS; CHEMICAL VAPOR DEPOSITED DIAMOND; CRYSTALLOGRAPHIC DIRECTIONS; DIAMOND GROWTH; DIAMOND LAYERS; ELASTIC STIFFNESS COEFFICIENTS; HETEROEPITAXIAL; LAYERED SYSTEMS; MASS DENSITIES; MULTIMODES; NONDISPERSIVE MODES; REVERSE PROBLEMS; SAMPLE PREPARATION; SI(0 0 1); SUBSTRATE SYSTEM; SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; DIAMONDS; ELASTIC MODULI; EXTRACTION; SURFACE PROPERTIES; YTTRIA STABILIZED ZIRCONIA; ZIRCONIA;

MECHANICAL PROPERTIES;

EID: 78149459979     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3493245     Document Type: Article

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