Mechanical properties of nanocrystalline diamond/amorphous carbon composite films prepared by microwave plasma chemical vapour deposition

Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 1997-2002

  Kulisch, W ^a,b   Popov, C ^b   Boycheva, S ^b   Buforn, L ^c   Favaro, G ^c   Conte, N ^c  

^a JOINT RESEARCH CENTRE   (Italy)

^b UNIVERSITY OF KASSEL   (Germany)

^c CSM Instruments SA   (Switzerland)

Author keywords

Mechanical properties; Microwave plasma CVD; Nanocrystalline diamond films

Indexed keywords

ADHESION; AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; COATINGS; GRAIN BOUNDARIES; MECHANICAL PROPERTIES; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; TOUGHNESS;

MICROWAVE PLASMA CVD; NANOCRYSTALLINE DIAMOND FILMS; SILICON SUBSTRATES; TRIBOLOGICAL PROPERTIES;

DIAMOND FILMS;

EID: 7544239897     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.04.002     Document Type: Conference Paper

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