Mechanical properties of ultrananocrystalline diamond thin films relevant to MEMS/NEMS devices

Experimental Mechanics

Volumn 43, Issue 3, 2003, Pages 256-268

  Espinosa, H D ^a   Prorok, B C ^a   Peng, B ^a   Kim, K H ^a   Moldovan, N ^b   Auciello, O ^b   Carlisle, J A ^b   Gruen, D M ^b   Mancini, D C ^b  

^a Northwestern University   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

Experimental techniques; Fracture; Nanomaterials; Size effects; Thin films

Indexed keywords

ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; STRESSES;

MICROCANTILEVER;

ULTRATHIN FILMS;

DIAMOND; MECHANICAL PROPERTY; MICROELECTROMECHANICAL SYSTEM; NANOSTRUCTURE; TESTING METHOD; YOUNG MODULUS;

EID: 0141959723     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02410524     Document Type: Article

References (37)

1. Bustillo, J.M., Howe, R.T., and Muller, R.S., "Surface Micromachining for Microelectromechanical Systems," Proc. IEEE, 86, 1552-1574 (1998).
2. Sniegowski, J.J. and de Boer, M.P., "IC-compatible Polysilicon Surface Micromachining, " Annu. Rev. Mater. Res., 30, 299-333 (2000).
3. Bhushan, B., Tribology Issues and Opportunities in MEMS, Kluwer Academic, Dordrecht (1998).
4. de Boer, M.P. and Mayer, T.M., "Tribology of MEMS," MRS Bulletin, 4, 302-304 (2001).
5. Gruen, D., "Nanocrystalline Diamond Films." Annu. Rev. Mater. Sci., 29, 211-259 (1999).
6. Gruen, D.M., Liu, S., Krauss, A.R., Luo, J., and Pan, X., "Fullerenes as Precursors for Diamond Film Growth without Hydrogen or Oxygen Additions," Appl. Phys. Lett., 64, 1502-1504 (1994).
7. Gruen, D.M,, Liu, S., Krauss. A.R. and Pan, X., "Buckyball Microwave Plasmas: Fragmentation and Diamond-film Growth" J. Appl. Phys., 75, 1758-1763 (1994).
8. Bhattacharyya, B., Auciello, O. Birrell, J., Carlisle, J.A., Curtiss, L.A., Goyette, A.N., Gruen, D.M., Krauss, A.R., Schlueter. J., Suman, A., and Zapol. P., "Synthesis and Characterization of Highly-conducting Nitrogen-Doped Ultrananocrystalline Diamond Films." Appl. Phys. Lett., 79, 1441-1443 (2001).
9. Sumant, A.V., Auciello, O., Krauss, A.R., Gruen, D.M., Ersoy. D., Tucek, J., Jayatissa, A., Stach, E., Moldovan, N., Mancini, D., Busmann, H.G., and Meyer, E.M., "Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties," Mater. Res. Soc. Symp. Proc., 657 (2000).
10. Erdemir, A., Fenske, G.R., Krauss, A.R., Gruen, D.M., McCauley, T., and Csenesits, R.T., "Triboligical Properties of Nanocrystalline Diamond Films." Surf. Coat. Technol., 120-121, 565-572 (1999).
11. Krauss, A.R., Auciello, O., Ding, M.Q., Gruen, D.M., Huang, Y., Zhirnov. V.V., Givargizov. E.I., Breskin. A., Chechen, R., Shefer, E., Konov, V., Pimenov, S., Karabutov, A., Rakhimov, A., and Suetin, N., "Electron Field Emission for Ultrananocrystalline Diamond Films." J. Appl. Phys., 89, 2958-2967(2001).
12. Zapol, P., Sternberg, M., Curtiss, J., Frauenheim, T., and Druen, D.M., "Tight-binding Molecular-dynamics Simulation of Impurities in Ultrananocrystalline Diamond Grian Boundaries." Phys. Rev. B, 65 (2002).
13. Gruen, D.M., Krauss. A.R., Zhou, D., McCauley. T.G., and Corrigan, T.D., in Chemical Vapor Deposition, M.D. Allendorf and C. Bernard, eds. 97-25, 325-32, Electrotchem. Soc, Pennington Publishers. NJ (1997).
14. Auciello, O., Krauss, A.R., Gruen, D.M., Busmann, H.G., Meyer, E.M., Tucek, J., Sumant, A., Jayatissa, A., Moldovan, N., Mancini, D.C., and Gardos, M.N., "Two-and Three-dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-based MEMS Technology", Mater. Res. Soc. Symp. Proc., 605, 73-78 (2000).
15. Moldovan, N., Auciello, O., Sumant, A.V., Carlisle, J.A., Divan, R., Gruen, D.M., Krauss, A.R., Mancini. D.C., Jayatissa. A.. and Tucek, J., "Ultrananocrystalline Diamond Thin Films for MEMS and Moving Mechanical Assembly Devices." International Symposium on Micromachining and Microfabrication, 22-25 October 2001. San Francisco. CA, Proc. SPIE, 4557, 288-298(2001).
16. Nix, W.D., "Mechanical Properties of Thin Films." Metall. Trans. A, 20, 2217-2245 (1989).
17. Brotzen, F.R., "Mechanical Testing of Thin Films," Int. Mater Rev., 39, 24-45 (1994).
18. Kraft, O. and Volkert, C., "Mechanical Testing of Thin Films and Small Structures," Adv. Eng. Mater., 3, 99-110 (2001).
19. Weihs. T.P., Hong, S., Bravman, J.C., and Nix, W.D., "Mechanical Deflection of Cantilever Microbeams: A New Technique for Testing the Mechanical Properties of Thin Films." J. Mater. Res., 3, 931-942 (1988).
20. Schweitz., J.-A., "Mechanical Characterization of Thin Films by Micromechanical Techniques," MRS Bull., 17,34-45 (1992).
21. Kraft, O., Schwaiger, R., and Nix, W.D., "Measurement of Mechanical Properties in Small Dimensions by Microbeam Deflection," Mater. Res. Soc. Symp. Proc., 518. 39-44 (1998).
22. Espinosa. H.D., Fischer, M., Zhu, Y., and Lee. S., "3-D Computational Modeling of RF MEMS Switches." Proceedings of the 4th International Conference on Modeling and Simulation of Microsystems, M. Laudon and B. Romawnowicz, eds, 402-405 (2001).
23. Espinosa, H.D., Prorok, B.C., Zhu, Y., and Fischer, M., "An Invistigation. tigation of Plasticity) in MEMS Materials," Proceedings of InterPACK '01, 8-13 July, Kauai, Hawaii, USA (2001).
24. Espinosa, H.D., Prorok, B.C., and Fischer, M., "A Novel Experimental Technique for Testing Thin Films and MEMS Materials." Proceecding of the SEM Annual Conference on Experimental and Applied Mechanics, 4-6 June, Portland, Oregon, 446-449 (2001).
25. Espinosa, H.D., Prorok, B.C., and Fischer, M., "A Methodology for Detemining Mechanical Properties of Free-standing Thin Films and MEMS Materials," Journal of the Mechanics and Physics of Solids. 51, 47-67 (2003).
26. Fischer. M., "MEMS Materials Testing." Master Thesis, Purdue University, West Lafayette. IN (1999).
27. Burenkov, Y.A. and Nikanorov, S.P., "Temperature Dependence of the Elastic Constants of Silicon." Sov: Phys.-Solid State, 16, 963-964 (1974).
28. Peterson, K.E., "Silicon as a Mechanical Material," Proc. IEEE, 70 (5)(1982).
29. Sharpe, W.N., Jr., Jackson, K., Coles. G., and LaVan. D.A., "Mechanical Properties of Different Polysilicons," ASME,, Symposium on MicroElectro-Mechanical Systems (MEMS), Orlando. FL, Vol. 2 (2000).
30. Jackson, K.M., Bucheit, T.E., and LaVan. D.A., "Fracture Toughness of Thin Film Polysilicon Used in MEMS Devices." Proceedings of the MEMS. Society of Experimental Mechanics, 11-15(2001).
31. Lohner, K.A., Chen, K.-S., Ayon, A.A., and Spearing, S.M., "Microfabricated Silicon Carbide Microengine Structures," Mater. Res. Soc. Symp. Proc., 546, 85 90 (1999).
32. Henshall, J.L, Rowcliffe, D.J., and Edington, J.W., "Fracture Toughness of Single Crystal Silicon Carbide," J. Am. Ceram. Soc., 60 (1977).
33. Coles, G., Sharpe. W.N., Jr., and Edwards, R.L., "Mechanical Properties of Silicon Nitride," Proceedings of MEMS: Mechanics and Measureament Symposium, Society of Experimental Mechanics, 1-4 (200l).
34. Christiansen, S., Albrecht, M., and Strunk, H.P., "Mechanical Properties and Microstructural Analysis of Diamond-like Carbon Coating on an Alumina/glass Composite." J. Mater. Res., 11 (8) (1996).
35. Auciello, O., Gruen, D.M., Krauss, A.R., Jayatissa, A., Sumant, A., Tucek, J., Mancini, D.C., Moldovan, N., Erdemir A., Ersoy, D., Gardos. M.N., Busmann, H.G., and Meyer, E.M., SPIE 2000 Symposium on "Smart Materials and MEMS," Melbourne, Australia, 13-15 December, Proc. SPIE (2001).
36. Bobji, M.S. and Biswas, S.K., "Deconvolution of Hardness from Data Obtained from Nanoindentation of Rough Surfaces," J. Mater. Res., 14, 2259-2268 (1999).
37. Krauss, A.R., Auciello, O., Gruen, D.M., Jayatissa, A., Sumant. A., Tucek, J., Mancini, D.C., Moldovan, N., Erdemir, A., Ersoy D., Gardos, M.N., Busmann, H.G., Meyer. E.M., and Ding, M.Q., "Ultranonacrystalline Diamond Thin Films for MEMS and Moving Mechanical Assembly Devices," Diam. Relat. Mater., 10, 1952-1961