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Volumn 20, Issue 2, 2011, Pages 221-226
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Mechanical properties of MWPECVD diamond coatings on Si substrate via nanoindentation
a
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Author keywords
Hardness; Nanoindentation; Polycrystalline diamond coatings; Young's modulus
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Indexed keywords
COATING THICKNESS;
DIAMOND COATING;
DIFFERENT THICKNESS;
HARDNESS AND ELASTIC MODULUS;
MAXIMUM LOAD;
MICROWAVE PLASMA;
NANOINDENTATION EXPERIMENTS;
NATURAL DIAMONDS;
POLISHED SURFACES;
POLYCRYSTALLINE DIAMOND COATINGS;
POLYCRYSTALLINE DIAMOND FILMS;
SI SUBSTRATES;
SILICON SUBSTRATES;
YOUNG'S MODULUS;
DIAMOND CUTTING TOOLS;
DIAMOND FILMS;
DIAMONDS;
ELASTIC MODULI;
ELASTICITY;
HARDNESS;
MECHANICAL PROPERTIES;
NANOINDENTATION;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SUBSTRATES;
THICKNESS MEASUREMENT;
COATINGS;
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EID: 79551538248
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2010.12.002 Document Type: Article |
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Times cited : (21)
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References (17)
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