메뉴 건너뛰기




Volumn 11, Issue 17, 2011, Pages 2929-2940

Micro-valve using induced-charge electrokinetic motion of Janus particle

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; ELECTRIC FIELD; FLOW RATE; INDUCED CHARGE ELECTROKINETIC MOTION; JANUS PARTICLE; KINETICS; MICRO VALVE; MICROFLUIDICS; MOTION; PARTICULATE MATTER; PRIORITY JOURNAL; SIMULATION; THEORETICAL MODEL; VALVE; VORTEX MOTION;

EID: 80051645630     PISSN: 14730197     EISSN: 14730189     Source Type: Journal    
DOI: 10.1039/c1lc20229d     Document Type: Article
Times cited : (45)

References (75)
  • 4
    • 14544286392 scopus 로고    scopus 로고
    • Micromixers - A review on passive and active mixing principles
    • DOI 10.1016/j.ces.2004.11.033, PII S0009250904009364
    • V. Hessel H. Löwe F. Schönfeld Micromixers - a review on passive and active mixing principles Chem. Eng. Sci. 2005 60 8 2479 2501 (Pubitemid 40306800)
    • (2005) Chemical Engineering Science , vol.60 , Issue.8-9 SPEC. ISS. , pp. 2479-2501
    • Hessel, V.1    Lowe, H.2    Schonfeld, F.3
  • 6
    • 34447299421 scopus 로고    scopus 로고
    • Micropumps, microvalves, and micromixers within PCR microfluidic chips: Advances and trends
    • DOI 10.1016/j.biotechadv.2007.05.003, PII S0734975007000687
    • C. Zhang D. Xing Y. Li Micropumps, microvalves and micromixers within PCR microfluidic chips: advantages and trends Biotechnol. Adv. 2007 25 483 514 (Pubitemid 47049789)
    • (2007) Biotechnology Advances , vol.25 , Issue.5 , pp. 483-514
    • Zhang, C.1    Xing, D.2    Li, Y.3
  • 9
    • 77955005920 scopus 로고    scopus 로고
    • Mixed-mode electrokinetic and chromatographic peptide separations in a microvalve-integrated polymer chip
    • J. Liu C.-F. Chen S. Yang C.-C. Chang D. L. Devoe Mixed-mode electrokinetic and chromatographic peptide separations in a microvalve- integrated polymer chip Lab Chip August 2010 10 16 2122 2129
    • (2010) Lab Chip , vol.10 , Issue.16 , pp. 2122-2129
    • Liu, J.1    Chen, C.-F.2    Yang, S.3    Chang, C.-C.4    Devoe, D.L.5
  • 10
    • 0018653907 scopus 로고
    • A gas chromatographic air analyzer fabricated on a silicon wafer
    • S. C. Terry J. H. Jerman J. B. Angell A gas chromatographic air analyzer fabricated on a silicon wafer IEEE Trans. Electron Devices 1979 26 1880 1886 (Pubitemid 10128644)
    • (1979) IEEE Transactions on Electron Devices , vol.26 , Issue.12 , pp. 1880-1886
    • Terry, S.C.1    Jerman, J.H.2    Angell, J.B.3
  • 14
    • 0035386369 scopus 로고    scopus 로고
    • Stress analysis of silicon membranes with electroplated permalloy films using Raman scattering
    • DOI 10.1109/20.951295, PII S0018946401071655
    • H. J. Cho K. W. Oh C. H. Ahn P. Boolchand T.-C. Nam Stress analysis of silicon membranes with electroplated permalloy films using Raman scattering IEEE Trans. Magn. 2001 37 2749 2751 (Pubitemid 32969420)
    • (2001) IEEE Transactions on Magnetics , vol.37 , Issue.4 I , pp. 2749-2751
    • Cho, H.J.1    Oh, K.W.2    Ahn, C.H.3    Boolchand, P.4    Nam, T.-C.5
  • 15
    • 33744484636 scopus 로고    scopus 로고
    • In-line Micro Ball Valve through Polymer Tubing
    • in, 407-408
    • K. W. Oh, R. Rong and C. H. Ahn, In-line Micro Ball Valve through Polymer Tubing, in Proc. MicroTAS 2001, 2001, pp. 407-408
    • (2001) Proc. MicroTAS 2001
    • Oh, K.W.1    Rong, R.2    Ahn, C.H.3
  • 16
    • 0036686923 scopus 로고    scopus 로고
    • Feasibility test of an electromagnetically driven valve actuator for glaucoma treatment
    • DOI 10.1109/JMEMS.2002.800921, PII 1011092002800921
    • B. Bae N. Kim H. Kee S.-H. Kim Y. Lee S. Lee K. Park Feasibility test of an electromagnetically driven valve actuator for glaucoma treatment J. Microelectromech. Syst. 2002 11 344 354 (Pubitemid 34950042)
    • (2002) Journal of Microelectromechanical Systems , vol.11 , Issue.4 , pp. 344-354
    • Bae, B.1    Kim, N.2    Kee, H.3    Kim, S.-H.4    Lee, Y.5    Lee, S.6    Park, K.7
  • 17
    • 0037765106 scopus 로고    scopus 로고
    • Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding
    • C. Fu Z. Rummler W. Chomburg Magnetically driven micro ball valves fabricated by multilayer adhesive film bonding J. Micromech. Microeng. 2003 13 S96 S102
    • (2003) J. Micromech. Microeng. , vol.13
    • Fu, C.1    Rummler, Z.2    Chomburg, W.3
  • 18
    • 27944469459 scopus 로고    scopus 로고
    • Miniaturization of pinch-type valves and pumps for practical micro total analysis system integration
    • DOI 10.1088/0960-1317/15/12/029, PII S0960131705065393
    • K. W. Oh R. Rong C. H. Ahn Miniaturization of pinch-type valves and pumps for practical micro total analysis system integration J. Micromech. Microeng. 2005 15 2449 2455 (Pubitemid 41677114)
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , Issue.12 , pp. 2449-2455
    • Oh, K.W.1    Rong, R.2    Ahn, C.H.3
  • 23
    • 0033333634 scopus 로고    scopus 로고
    • Design, fabrication, and testing of micromachined silicone rubber membrane valves
    • DOI 10.1109/84.809053
    • X. Yang C. Grosjean Y.-C. Tai Design, fabrication, and testing of micromachined silicone rubber membrane valves J. Microelectromech. Syst. 1999 8 393 402 (Pubitemid 30552566)
    • (1999) Journal of Microelectromechanical Systems , vol.8 , Issue.4 , pp. 393-402
    • Yang, X.1    Grosjean, C.2    Tai, Y.-C.3
  • 24
    • 0036140507 scopus 로고    scopus 로고
    • A high density microchannel network with integrated valves and photodiodes
    • DOI 10.1016/S0924-4247(01)00717-8, PII S0924424701007178
    • D. Baechi R. Buser J. Dual A high density microchannel network with integrated valves and photodiodes Sens. Actuators, A 2002 95 77 83 (Pubitemid 34063677)
    • (2002) Sensors and Actuators, A: Physical , vol.95 , Issue.2-3 , pp. 77-83
    • Baechi, D.1    Buser, R.2    Dual, J.3
  • 25
    • 0037390890 scopus 로고    scopus 로고
    • A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing
    • C. A. Rich K. D. Wise A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing J. Microelectromech. Syst. 2003 12 201 208
    • (2003) J. Microelectromech. Syst. , vol.12 , pp. 201-208
    • Rich, C.A.1    Wise, K.D.2
  • 26
    • 2542425060 scopus 로고    scopus 로고
    • A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass
    • J.-H. Kim K.-H. Na C. J. Kang D. Jeon Y.-S. Kim A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass Microelectron. Eng. 2004 73-74 864 869
    • (2004) Microelectron. Eng. , vol.7374 , pp. 864-869
    • Kim, J.-H.1    Na, K.-H.2    Kang, C.J.3    Jeon, D.4    Kim, Y.-S.5
  • 27
    • 17044413727 scopus 로고    scopus 로고
    • A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon
    • DOI 10.1016/j.sna.2004.10.023, PII S0924424704007745
    • H. Takao K. Miyamura H. Ebi M. Ashiki K. Sawada K. Ishida A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon Sens. Actuators, A 2005 119 468 475 (Pubitemid 40497193)
    • (2005) Sensors and Actuators, A: Physical , vol.119 , Issue.2 , pp. 468-475
    • Takao, H.1    Miyamura, K.2    Ebi, H.3    Ashiki, M.4    Sawada, K.5    Ishida, M.6
  • 28
    • 0028728131 scopus 로고
    • Electrically activated, normally closed diaphragm valves
    • H. Jerman Electrically activated, normally closed diaphragm valves J. Micromech. Microeng. 1994 4 210 216
    • (1994) J. Micromech. Microeng. , vol.4 , pp. 210-216
    • Jerman, H.1
  • 30
    • 0029429844 scopus 로고
    • TiNi (shape memory) films on silicon for MEMS applications
    • R. H. Wolf A. H. Heuer TiNi (shape memory) films on silicon for MEMS applications J. Microelectromech. Syst. 1995 4 206 212
    • (1995) J. Microelectromech. Syst. , vol.4 , pp. 206-212
    • Wolf, R.H.1    Heuer, A.H.2
  • 31
    • 0031164001 scopus 로고    scopus 로고
    • An implantable drug-delivery system based on shape memory alloy micro-actuation
    • PII S0924424797015811
    • D. Reynaerts J. Peirs H. Van Brussel An implantable drug-delivery system based on shape memory alloy micro-actuaries Sens. Actuators, A 1997 61 455 462 (Pubitemid 127402169)
    • (1997) Sensors and Actuators, A: Physical , vol.61 , Issue.1-3 , pp. 455-462
    • Reynaerts, D.1    Peirs, J.2    Van Brussel, H.3
  • 32
    • 0033741544 scopus 로고    scopus 로고
    • Thin film shape memory microvalves with adjustable operation temperature
    • M. Kohl D. Dittmann E. Quandt B. Winzek Thin film shape memory microvalves with adjustable operation temperature Sens. Actuators, A 2000 83 214 219
    • (2000) Sens. Actuators, A , vol.83 , pp. 214-219
    • Kohl, M.1    Dittmann, D.2    Quandt, E.3    Winzek, B.4
  • 33
    • 3042703722 scopus 로고    scopus 로고
    • A TiNiPd thin film microvalve for high temperature applications
    • DOI 10.1016/j.msea.2003.10.369, PII S0921509304000097
    • Y. Liu M. Kohl K. Okutsu S. Miyazaki A TiNiPd thin film microvalve for high temperature applications Mater. Sci. Eng., A 2004 378 205 209 (Pubitemid 38865669)
    • (2004) Materials Science and Engineering A , vol.378 , Issue.1-2 SPEC. ISS. , pp. 205-209
    • Liu, Y.1    Kohl, M.2    Okutsu, K.3    Miyazaki, S.4
  • 34
    • 0033336929 scopus 로고    scopus 로고
    • Miniature shape memory alloy pinch valve
    • DOI 10.1016/S0924-4247(99)00157-0
    • C. M. Pemble B. C. Towe A miniature shape memory alloy pinch valve Sens. Actuators, A 1999 77 145 148 (Pubitemid 30505959)
    • (1999) Sensors and Actuators, A: Physical , vol.77 , Issue.2 , pp. 145-148
    • Pemble, C.M.1    Towe, B.C.2
  • 37
    • 0028698326 scopus 로고
    • An electrostatically actuated gas valve with an S-shaped film element
    • K. Sato M. Shikida An electrostatically actuated gas valve with an S-shaped film element J. Micromech. Microeng. 1994 4 205 209
    • (1994) J. Micromech. Microeng. , vol.4 , pp. 205-209
    • Sato, K.1    Shikida, M.2
  • 40
    • 0032208479 scopus 로고    scopus 로고
    • A low pressure micromachined flow modulator
    • PII S0924424798001605
    • J. K. Robertson K. D. Wise A low pressure micromachined flow modulator Sens. Actuators, A 1998 71 98 106 (Pubitemid 128399350)
    • (1998) Sensors and Actuators, A: Physical , vol.71 , Issue.1-2 , pp. 98-106
    • Robertson, J.K.1    Wise, K.D.2
  • 41
    • 0035362692 scopus 로고    scopus 로고
    • A novel bulk-micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display
    • DOI 10.1109/84.925734, PII S1057715701039415
    • L. Yobas M. A. Huff F. J. Lisy D. M. Durand A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display J. Microelectromech. Syst. 2001 10 187 196 (Pubitemid 32583114)
    • (2001) Journal of Microelectromechanical Systems , vol.10 , Issue.2 , pp. 187-196
    • Yobas, L.1    Huff, M.A.2    Lisy, F.J.3    Durand, D.M.4
  • 43
    • 0036727478 scopus 로고    scopus 로고
    • A high-stroke, high-pressure electrostatic actuator for valve applications
    • DOI 10.1016/S0924-4247(02)00070-5, PII S0924424702000705
    • W. Van der Wijngaart H. Ask P. Enoksson G. Stemme A high-stroke, high-pressure electrostatic actuator for valve applications Sens. Actuators, A 2002 100 264 271 (Pubitemid 34975195)
    • (2002) Sensors and Actuators, A: Physical , vol.100 , Issue.2-3 , pp. 264-271
    • Van Der Wijngaart, W.1    Ask, H.2    Enoksson, P.3    Stemme, G.4
  • 45
    • 69749094726 scopus 로고    scopus 로고
    • Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications
    • M. M. Teymoori E. Abbaspour-Sani Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications Sens. Actuators, A 2005 117 222 229
    • (2005) Sens. Actuators, A , vol.117 , pp. 222-229
    • Teymoori, M.M.1    Abbaspour-Sani, E.2
  • 46
    • 0034611669 scopus 로고    scopus 로고
    • Functional hydrogel structures for autonomous flow control inside microfluidic channels
    • DOI 10.1038/35007047
    • D. J. Beebe J. S. Moore J. M. Bauer Q. Yu R. H. Liu C. Devadoss B. H. Jo Functional hydrogel structures for autonomous flow control inside microfluidic channels Nature 2000 404 588 590 (Pubitemid 30205053)
    • (2000) Nature , vol.404 , Issue.6778 , pp. 588-590
    • Beebe, D.J.1    Moore, J.S.2    Bauer, J.M.3    Yu, Q.4    Liu, R.H.5    Devadoss, C.6    Jo, B.-H.7
  • 47
    • 0036645755 scopus 로고    scopus 로고
    • DNA amplification and hybridization assays in integrated plastic monolithic devices
    • DOI 10.1021/ac020094q
    • Y. Liu C. B. Rauch R. L. Stevens R. Lenigk J. Yang D. B. Rhine P. Grodzinski DNA amplification and hybridization assays in integrated plastic monolithic devices Anal. Chem. 2002 74 3063 3070 (Pubitemid 34755218)
    • (2002) Analytical Chemistry , vol.74 , Issue.13 , pp. 3063-3070
    • Liu, Y.1    Rauch, C.B.2    Stevens, R.L.3    Lenigk, R.4    Yang, J.5    Rhine, D.B.6    Grodzinski, P.7
  • 51
    • 1842477059 scopus 로고    scopus 로고
    • Self-Contained, Fully Integrated Biochip for Sample Preparation, Polymerase Chain Reaction Amplification, and DNA Microarray Detection
    • DOI 10.1021/ac0353029
    • R. H. Liu J. Yang R. Lenigk J. Bonanno P. Grodzinski Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection Anal. Chem. 2004 76 1824 1831 (Pubitemid 38451495)
    • (2004) Analytical Chemistry , vol.76 , Issue.7 , pp. 1824-1831
    • Liu, R.H.1    Yang, J.2    Lenigk, R.3    Bonanno, J.4    Grodzinski, P.5
  • 52
    • 0034615958 scopus 로고    scopus 로고
    • Monolithic microfabricated valves and pumps by multilayer soft lithography
    • DOI 10.1126/science.288.5463.113
    • M. A. Unger H.-P. Chou T. Thorsen A. Scherer S. R. Quake Monolithic microfabricated valves and pumps by multilayer soft lithography Science 2000 288 113 116 (Pubitemid 30203039)
    • (2000) Science , vol.288 , Issue.5463 , pp. 113-116
    • Unger, M.A.1    Chou, H.-P.2    Thorsen, T.3    Scherer, A.4    Quake, S.R.5
  • 53
    • 0036773145 scopus 로고    scopus 로고
    • A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks
    • DOI 10.1109/JMEMS.2002.803414
    • H. Takao M. Ishida K. Sawada A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks J. Microelectromech. Syst. 2002 11 421 426 (Pubitemid 35242046)
    • (2002) Journal of Microelectromechanical Systems , vol.11 , Issue.5 , pp. 421-426
    • Takao, H.1    Ishida, M.2    Sawada, K.3
  • 54
    • 3542998691 scopus 로고    scopus 로고
    • Two-dimensional protein separation with advanced sample and buffer isolation using microfluidic valves
    • DOI 10.1021/ac0497499
    • Y.-C. Wang M. H. Choi J. Han Two-dimensional protein separation with advanced sample and buffer isolation using microfluidic valves Anal. Chem. 2004 76 4426 4431 (Pubitemid 39014016)
    • (2004) Analytical Chemistry , vol.76 , Issue.15 , pp. 4426-4431
    • Wang, Y.-C.1    Choi, M.H.2    Han, J.3
  • 55
    • 26844540072 scopus 로고    scopus 로고
    • A World-to-chip Microfluidic Interconnection Technology with Dual Functions of Sample Injection and Sealing for a Multichamber Micro PCR Chip
    • in, 714-717
    • K. W. Oh, C. Park and K. Namkoong, A World-to-chip Microfluidic Interconnection Technology with Dual Functions of Sample Injection and Sealing for a Multichamber Micro PCR Chip, in Proc. IEEE MEMS, 2005, pp. 714-717
    • (2005) Proc. IEEE MEMS
    • Oh, K.W.1    Park, C.2    Namkoong, K.3
  • 56
    • 0035443367 scopus 로고    scopus 로고
    • Fluidic microsystems based on printed circuit board technology
    • DOI 10.1088/0960-1317/11/5/313, PII S0960131701222980
    • A. Wego S. Richter L. Pagel Fluidic Microsystems based on printed circuit board technology J. Micromech. Microeng. 2001 11 528 531 (Pubitemid 32897677)
    • (2001) Journal of Micromechanics and Microengineering , vol.11 , Issue.5 , pp. 528-531
    • Wego, A.1    Richter, S.2    Pagel, L.3
  • 57
    • 0037058643 scopus 로고    scopus 로고
    • Fabrication and testing of a magnetically actuated micropump
    • DOI 10.1016/S0925-4005(02)00272-1, PII S0925400502002721
    • S. Santra P. Holloway C. D. Batich Fabrication and testing of a magnetically actuated micropump Sens. Actuators, B 2002 87 358 364 (Pubitemid 35282283)
    • (2002) Sensors and Actuators, B: Chemical , vol.87 , Issue.2 , pp. 358-364
    • Santra, S.1    Holloway, P.2    Batich, C.D.3
  • 58
    • 0346147004 scopus 로고    scopus 로고
    • Development of MEMS-based cerebrospinal fluid shunt system
    • DOI 10.1023/A:1027309830365
    • S. Chung J. K. Kim K. C. Wang D.-C. Han J.-K. Chang Development of MEMS-based cerebrospinal fluid shunt system Biomed. Microdevices 2003 5 311 321 (Pubitemid 37536855)
    • (2003) Biomedical Microdevices , vol.5 , Issue.4 , pp. 311-321
    • Chung, S.1    Kim, J.K.2    Wang, K.C.3    Han, D.-C.4    Chang, J.-K.5
  • 59
    • 2342578816 scopus 로고    scopus 로고
    • Micropump based on PZT unimorph and one-way parylene valves
    • G.-H. Feng E. S. Kim Micropump based on PZT unimorph and one-way parylene valves J. Micromech. Microeng. 2004 14 429 435
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 429-435
    • Feng, G.-H.1    Kim, E.S.2
  • 60
    • 43049173600 scopus 로고    scopus 로고
    • Micromixing using induced-charge electrokinetic flow
    • Z. Wu D. Li Micromixing using induced-charge electrokinetic flow Electrochim. Acta 2008 53 5827 5835
    • (2008) Electrochim. Acta , vol.53 , pp. 5827-5835
    • Wu, Z.1    Li, D.2
  • 61
    • 44249107584 scopus 로고    scopus 로고
    • Mixing and flow regulating by induced-charge electrokinetic flow in a microchannel with a pair of conducting triangle hurdles
    • DOI 10.1007/s10404-007-0227-7
    • Z. Wu D. Li Mixing and flow regulating by induced-charge electrokinetic flow in a microchannel with a pair of conducting triangle hurdles Microfluid. Nanofluid. 2008 5 65 76 (Pubitemid 351722236)
    • (2008) Microfluidics and Nanofluidics , vol.5 , Issue.1 , pp. 65-76
    • Wu, Z.1    Li, D.2
  • 62
    • 64049096545 scopus 로고    scopus 로고
    • Induced-charge electrophoretic motion of ideally polarizable particles
    • Z. Wu D. Li Induced-charge electrophoretic motion of ideally polarizable particles Electrochim. Acta 2009 54 3960 3967
    • (2009) Electrochim. Acta , vol.54 , pp. 3960-3967
    • Wu, Z.1    Li, D.2
  • 63
    • 63649149611 scopus 로고    scopus 로고
    • Electrophoretic motion of ideally polarized particles in microchannels
    • Z. Wu Y. Gao D. Li Electrophoretic motion of ideally polarized particles in microchannels Electrophoresis 2009 30 773 781
    • (2009) Electrophoresis , vol.30 , pp. 773-781
    • Wu, Z.1    Gao, Y.2    Li, D.3
  • 64
    • 79954617275 scopus 로고    scopus 로고
    • 3D numerical study of induced-charge electrokinetic motion of a heterogeneous particle in a microchannel
    • Y. Daghighi Y. Gao D. Li 3D numerical study of induced-charge electrokinetic motion of a heterogeneous particle in a microchannel Electrochim. Acta 2011 56 4254 4262
    • (2011) Electrochim. Acta , vol.56 , pp. 4254-4262
    • Daghighi, Y.1    Gao, Y.2    Li, D.3
  • 67
    • 22244458290 scopus 로고    scopus 로고
    • Eccentric electrophoretic motion of a sphere in circular cylindrical microchannels
    • DOI 10.1007/s10404-004-0016-5
    • C. Ye D. Li Eccentric electrophoretic motion of a spherical particle in a circular cylindrical microchannel Microfluid. Nanofluid. 2005 1 234 241 (Pubitemid 40986342)
    • (2005) Microfluidics and Nanofluidics , vol.1 , Issue.3 , pp. 234-241
    • Ye, C.1    Xuan, X.2    Li, D.3
  • 68
    • 19344364370 scopus 로고    scopus 로고
    • Electrophoretic motion of two spherical particles in a rectangular microchannel
    • DOI 10.1007/s10404-004-0004-9
    • C. Ye D. Li Electrophoretic motion of two particles in a rectangular microchannel Microfluid. Nanofluid. 2004 1 52 61 (Pubitemid 41158308)
    • (2004) Microfluidics and Nanofluidics , vol.1 , Issue.1 , pp. 52-61
    • Ye, C.1    Li, D.2
  • 69
    • 0036734906 scopus 로고    scopus 로고
    • Fabrication of star grooves and rhombus grooves micro heat pipe
    • S.-W. Kang D. Huang Fabrication of star grooves and rhombus grooves micro heat pipe J. Micromech. Microeng. 2002 12 525 531
    • (2002) J. Micromech. Microeng. , vol.12 , pp. 525-531
    • Kang, S.-W.1    Huang, D.2
  • 70
    • 2442583482 scopus 로고    scopus 로고
    • Fabrication of SU-8 embedded microchannels with circular cross-section
    • l.-j. Yang Y.-T. Chen S.-W. Kang Y.-C. Wang Fabrication of SU-8 embedded microchannels with circular cross-section Int. J. Mach. Tool Manufact. 2004 44 1109 1114
    • (2004) Int. J. Mach. Tool Manufact. , vol.44 , pp. 1109-1114
    • Yang, J.1    Chen, Y.-T.2    Kang, S.-W.3    Wang, Y.-C.4
  • 71
    • 33646684704 scopus 로고    scopus 로고
    • Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching
    • V. Maselli R. Osellame G. Cerullo R. Ramponi P. Laporta L. Magagnin P. L. Cavallotti Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching Appl. Phys. Lett. 2006 88 191107
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 191107
    • Maselli, V.1    Osellame, R.2    Cerullo, G.3    Ramponi, R.4    Laporta, P.5    Magagnin, L.6    Cavallotti, P.L.7
  • 72
    • 77956263377 scopus 로고    scopus 로고
    • A rapid and simple fabrication method for 3-dimensional circular microfluidic channel using metal wire removal process
    • S.-H. Song C.-K. Lee T.-J. Kim I.-C. Shin S.-C. Jun H.-I. Jung A rapid and simple fabrication method for 3-dimensional circular microfluidic channel using metal wire removal process Microfluid. Nanofluid. 2010 9 533 540
    • (2010) Microfluid. Nanofluid. , vol.9 , pp. 533-540
    • Song, S.-H.1    Lee, C.-K.2    Kim, T.-J.3    Shin, I.-C.4    Jun, S.-C.5    Jung, H.-I.6
  • 73
    • 32844472070 scopus 로고    scopus 로고
    • Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8
    • DOI 10.1016/j.sna.2005.11.007, PII S0924424705006278
    • R. Yang S. A. Soper W. Wang Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8 Sens. Actuators, A 2006 127 1 123 130 (Pubitemid 43253673)
    • (2006) Sensors and Actuators, A: Physical , vol.127 , Issue.1 , pp. 123-130
    • Yang, R.1    Soper, S.A.2    Wang, W.3
  • 74
    • 49949103518 scopus 로고    scopus 로고
    • Design and fabrication of an electrochemically actuated microvalve
    • D. E. Lee S. Soper W. Wang Design and fabrication of an electrochemically actuated microvalve Microsyst. Technol. 2008 14 1751 1756
    • (2008) Microsyst. Technol. , vol.14 , pp. 1751-1756
    • Lee, D.E.1    Soper, S.2    Wang, W.3
  • 75
    • 14244266612 scopus 로고    scopus 로고
    • A novel microfabrication of a self-aligned vertical comb drive on a single SOI wafer for optical MEMS applications
    • DOI 10.1088/0960-1317/15/2/005
    • K.-H. Jeong L. P. Lee A novel microfabrication of a self-aligned vertical comb drive on a single SOI wafer for optical MEMS applications J. Micromech. Microeng. 2005 15 277 281 (Pubitemid 40285583)
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , Issue.2 , pp. 277-281
    • Jeong, K.-H.1    Lee, L.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.