Design and fabrication of an electrochemically actuated microvalve

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1751-1756

  Lee, Dong Eun ^a   Soper, Steve ^b   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC DISCHARGE MACHINING; ELECTRODES; ELECTROLYSIS; HYDROGEN; METALLIZING; MICROCHANNELS; NANOFLUIDICS; NANOPARTICLES; NANOSTRUCTURES; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; PLATINUM; SODIUM CHLORIDE;

BIAS-VOLTAGE; ELECTRICAL SIGNALLING; FLOW CHANNELS; HYDROGEN GASES; MICRO CHAMBERS; MICRO PUMPING; MICRO VALVES; MICRO-FLUIDIC; MICROFABRICATION TECHNOLOGIES; NACL SOLUTIONS; PLATINUM NANO-PARTICLES; POLYDIMETHYLSILOXANE PDMS; PT BLACK; SU-8 POLYMER; SURFACE-TO-VOLUME RATIO; UV-LIGA; VALVE OPERATION; VOLUME OF FLUIDS; WORKING ELECTRODE;

VALVES (MECHANICAL);

EID: 49949103518     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0594-3     Document Type: Conference Paper

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