Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8

Sensors and Actuators, A: Physical

Volumn 127, Issue 1, 2006, Pages 123-130

  Yang, Ren ^a,b   Soper, Steven A ^a   Wang, Wanjun ^a,c  

^a LOUISIANA STATE UNIVERSITY   (United States)

^b Louisiana State University   (United States)

^c MEMS Technologies Sensors and Actuators   (United States)

Author keywords

3D microlens; Fiber bundle coupler; Fiberport collimator array; Out of plane refractive microlens array; Pre aligned; SU 8; UV lithography

Indexed keywords

3D MICROLENS; FIBER BUNDLE COUPLER; FIBERPORT COLLIMATOR ARRAY; OUT-OF-PLANE REFRACTIVE MICROLENS ARRAY; PRE-ALIGNED; SU-8; UV-LITHOGRAPHY;

ARRAYS; FIBER OPTICS; LITHOGRAPHY; MICROLENSES; OPTICAL COLLIMATORS;

ELECTRIC CONNECTORS;

EID: 32844472070     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.007     Document Type: Article

References (14)

1. K. Song, J. Bu, Y. Jeon, C. Park, J. Jeong, H. Koh, and M. Choi Micromachined silicon optical bench for the low cost optical module Proc. SPIE Int. Soc. Opt. Eng. 3878 1999 375 383
2. H. Han, J.D. Stack, J. Mathews, C.S. Koehler, E. Johnson, and A.D. Kathman Integration of silicon bench with micro optics Proc. SPIE Int. Soc. Opt. Eng. 3631 1999 234 243
3. T. Abe, Z. Ito, M. Enomoto, and Y. Matsumura New Fabrication Technique of Lens-ended Fibers for Optical Connector, No. 6 vol. 1 1986 Tohoku Kogyo Daigaku Kiyo Rikogakuhen pp. 21-27
4. W.R. Cox, T. Chen, D. Ussery, D.J. Hayes, J.A. Tatum, and D.L. MacFarlane Microjetted lenslet triplet fibers Opt. Commun. 123 4-6 1996 492 496
5. H. Yang, C. Chao, C. Lin, and S. Shen Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers J. Micromech. Microeng. 14 2 2004 277 282
6. C.T. Pan Silicon-based coupling platform for optical fiber switching in free space J. Micromech. Microeng. 14 1 2004 129 137
7. R. Yang, J.D. Williams, and W. Wang A rapid micro-mixer/reactor based on arrays of spatially impinging micro-jets J. Micromech. Microeng. 14 10 2004 1345L 1351
8. R. Yang, D.L. Feeback, and W. Wang Microfabrication and test of three-dimensional polymer hydro-focusing unit for flow cytometry applications Sens. Actuators A: Phys. 118 2 2005 259 267
9. R. Yang, and W. Wang Fabrication of out-of-plane SU-8 refractive microlens using directly lithography method Proceedings of the SPIE: SPIE Photonics West, vol. 5346 San Jose, CA 2004 151 159
10. R. Yang, and W. Wang Out-of-plane polymer refractive microlens fabricated based on direct lithography of SU-8 Sens. Actuators A: Phys. 113 1 2004 71 77
11. R. Yang, and W. Wang Numerical and experimental study on an out-of-plane pre-aligned refractive microlens fabricated using UV lithography method Opt. Eng. 43 12 2004 3096 3103
12. R. Yang, S.A. Soper, and W. Wang Fabrication of out-of-plane concave and convex refractive microlens array Proceedings of the SPIE: SPIE Photonics West, vol. 5717 San Jose, CA 2005 134 141
13. R. Yang, W. Wang, and S.A. Soper Out-of-plane microlens array fabricated using ultraviolet-lithography Appl. Phys. Lett. 86 2005 161110
14. H. Sato, T. Kakinuma, J.S. Go, and S. Shoji A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle: exposure and its microfilter application Proceedings of the IEEE MEMS Conference Kyoto, Japan 2003 223 226