Design, fabrication and characterization of an externally actuated ON/OFF microvalve

Sensors and Actuators, A: Physical

Volumn 147, Issue 2, 2008, Pages 600-606

  Casals Terre J ^a   Duch, M ^b   Plaza, J A ^b   Esteve, J ^b   Perez Castillejos R ^c   Valles E ^d   Gomez E ^d  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^c HARVARD UNIVERSITY   (United States)

^d UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Check valve; Magnetic structural analysis; ON OFF microvalve

Indexed keywords

COBALT; COBALT COMPOUNDS; CONFOCAL MICROSCOPY; COPPER PLATING; FINITE ELEMENT METHOD; IMAGING TECHNIQUES; MAGNETIC CIRCUITS; MAGNETIC DEVICES; MAGNETS; MICROSCOPIC EXAMINATION; NANOFLUIDICS; NICKEL; OPTICAL DESIGN; VALVES (MECHANICAL);

CHECK-VALVE; FEA MODELING; FINITE ELEMENT ANALYSIS; FLUID FLOWING; MAGNETIC FORCES; MAGNETIC-STRUCTURAL ANALYSIS; MICRO VALVES; MICRO-FLUIDIC; ON/OFF MICROVALVE; SOFT MAGNETIC;

MAGNETIC MATERIALS;

EID: 49849086008     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.06.022     Document Type: Article

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