Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching

Applied Physics Letters

Volumn 88, Issue 19, 2006, Pages

  Maselli, Valeria ^a   Osellame, Roberto ^a   Cerullo, Giulio ^a   Ramponi, Roberta ^a   Laporta, Paolo ^a   Magagnin, Luca ^a   Cavallotti, Pietro Luigi ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LASER BEAM EFFECTS; LASER BEAMS; LASER PULSES; OPTICAL SENSORS; OPTICAL WAVEGUIDES;

BIOPHOTONIC SENSORS; CHEMICAL ETCHING; FEMTOSECOND LASER PULSES;

FLUIDIC DEVICES;

EID: 33646684704     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2203335     Document Type: Article

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