A microvalve for hybrid microfluidic systems

Microsystem Technologies

Volumn 16, Issue 7, 2010, Pages 1269-1276

  Simone, G ^a,c   Perozziello, G ^b   Sardella, G ^a   Disegna, I ^c   Tori, S ^c   Manaresi, N ^a   Medoro, G ^a  

^a Silicon Biosystems Spa   (Italy)

^b DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

^c Olivetti jet Spa Loc le Vieux ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW RATE CONTROL; HYBRID BONDING; IN-PROCESS; LAB ON CHIP; MICRO FLUIDIC SYSTEM; MICRO VALVES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC CHANNEL; MICROFLUIDIC CHIP; MICROVOLUMES; ORGANOSILANES; PLASMA ETCHING PROCESS; POSITIVE PRESSURE; SILICON-BASED; THERMOPLASTIC POLYMER;

ESTERS; FLUIDIC DEVICES; PLASMA ETCHING; PLASTICS; RUBBER; THERMOPLASTIC ELASTOMERS; VALVES (MECHANICAL);

MICROFLUIDICS;

EID: 77955854412     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0986-z     Document Type: Conference Paper

References (11)

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