Post-CMOS compatible aluminum nitride MEMS filters and resonant sensors

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 412-419

  Olsson III, Roy H ^a   Fleming, James G ^a   Wojciechowski, Kenneth E ^a   Baker, Michael S ^a   Tuck, Melanie R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL FILTERS; MEMS; NITRIDES; RADIO SYSTEMS; RESONATORS; TRANSCEIVERS; WAVE FILTERS;

EUROPEAN; FREQUENCY CONTROLS; POST-CMOS;

MICROELECTROMECHANICAL DEVICES;

EID: 51049114444     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319108     Document Type: Conference Paper

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