Silicon nitride-on-silicon bar resonator using internal electrostatic transduction

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 2139-2142

  Bhave, Sunil A ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrostatic transducer; Resonator; RF MEMS; Silicon Nitride

Indexed keywords

ELECTROSTATIC TRANSDUCERS; POLYSILICON ELECTRODES; QUALITY FACTORS; RF MEMS;

CMOS INTEGRATED CIRCUITS; ELECTRIC IMPEDANCE; ELECTROSTATICS; PERMITTIVITY; PIEZOELECTRIC TRANSDUCERS; SILICON NITRIDE; THIN FILMS; TRANSDUCERS;

RESONATORS;

EID: 27544488128     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1497527     Document Type: Conference Paper

References (11)

1. T. Mattila, et al, "Micromechanical Bulk Acoustic Wave Resonator," Ultrasonics Symposium, 2002, pp. 945-948.
2. S. Humad, et al, "High Frequency Micromechanical Piezo-on-Silicon Block Resonators," IEDM 2003, pp. 957-960.
3. G. Piazza, et al, "Low Motional Resistance Ring-Shaped Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators for UHF Applications," MEMS 2005, pp. 20-23.
4. M. Demirci, et al, "Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance," Transducers 2003, pp. 955-958.
5. S. -S. Li, et al, "Micromechanical 'Hollow-Disk' Ring Resonators," MEMS 2004, pp. 821-824.
6. S. Pourkamali, et al, "Vertical Capacitive SiBARs," MEMS 2005, pp. 211-214.
7. S. A. Bhave and R. T. Howe, "Internal Electrostatic Transduction for Bulk-Mode MEMS Resonators," Hilton Head 2004, pp. 59-60.
8. R. A. Johnson, "Mechanical Filters in Electronics," New York, NY, Wiley, 1983.
9. F. A. Fischer, "Fundamentals of Electroacoustics," London, UK, Interscience Publishers, 1955.
10. S. Bouwstra, et al, "Excitation and Detection of Vibrations of Micromechanical Structures using a Dielectric Thin Film," Sensors and Actuators, 17 (1989), pp. 219-223.
11. R. G. Gordon, et al., "A kinetic model for step coverage by atomic-layer deposition in narrow trenches," Chemical Vapor Deposition, 9 (2003), pp. 73-78.