Air damping in laterally oscillating microresonators: A numerical and experimental study

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 557-566

  Ye, Wenjing ^a   Wang, Xin ^c   Hemmert, Werner ^b   Freeman, Dennis ^c   White, Jacob ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b INFINEON TECHNOLOGIES AG   (Germany)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Accelerated boundary element method; Air damping; Electrostatic resonator; Image motion analysis; Quality factor; Simulation; Stokes flow

Indexed keywords

AIR; COMPUTER SYSTEMS; COMPUTER VISION; DAMPING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NUMERICAL METHODS; ONE DIMENSIONAL; THREE DIMENSIONAL;

AIR DAMPING; COMB DRIVE RESONATOR; COMPUTER MICROVISION SYSTEM; FAST STOKES SOLVER; THREE DIMENSIONAL STOKES EQUATION;

RESONATORS;

EID: 0242636521     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.817895     Document Type: Article

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