Epitaxial silicon microshell vacuum-encapsulated cmos-compatible 200 mhz bulk-mode resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 23-26

  Chen, Kuan Lin ^a   Chandrahalim, Hengky ^b   Grahaml, Andrew B ^a   Bhave, Sunil A ^b   Howe, Roger T ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

^b Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MODE; CMOS COMPATIBLE; ENCAPSULATED RESONATORS; EPITAXIAL SILICON; LOCAL OSCILLATORS; QUALITY FACTORS; RESONANT FREQUENCIES; RF-MEMS;

MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; SPECTRUM ANALYZERS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 65949093325     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805309     Document Type: Conference Paper

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