Epitaxial silicon microshell vacuum-encapsulated cmos-compatible 200 mhz bulk-mode resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 23-26

  Chen, Kuan Lin ^a   Chandrahalim, Hengky ^b   Grahaml, Andrew B ^a   Bhave, Sunil A ^b   Howe, Roger T ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

^b Cornell University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MODE; CMOS COMPATIBLE; ENCAPSULATED RESONATORS; EPITAXIAL SILICON; LOCAL OSCILLATORS; QUALITY FACTORS; RESONANT FREQUENCIES; RF-MEMS;

MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS; SPECTRUM ANALYZERS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 65949093325     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805309     Document Type: Conference Paper

References (13)

1. G. Marconi, "Wireless telegraphy," Smithsonian Institution, Washington, D.C.,Annual Report - 1901, 1902, pp. 287-298.
2. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "60-MHz wine glass micromechanical disk reference oscillator," Digest of Technical Papers, 2004 IEEE International Solid - State Circuits Conference, San Francisco, California, Feb. 15-19, 2004, pp. 322-323.
3. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "A micromechanical parallel-class disk-array filter,". Proceedings, 2006 IEEE Int Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361
4. G.K. Ho, R. Abdolvand, and F. Ayazi, "Through- Support-Coupled Micromechanical Filter Array," Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS '04), Maastricht, the Netherlands, Jan. 2004, pp.769-772.
5. Hengky Chandrahalim and Sunil A. Bhave, "Digitally-tunable MEMS filter using mechanicallycoupled resonator array," 21St IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, Arizona, January 13-17, 2008, pp. 1020-1023.
6. Sunil A. Bhave and Roger T. Howe, "Silicon nitrideon- silicon bar resonator using internal electrostatic transduction," 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05), Seoul, Korea, June 5-9, 2005, pp. 2139-2142.
7. R. Candler et al, "Single wafer encapsulation of MEMS devices," IEEE Trans. on Advanced Packaging 26(3) pp. 227-232, 2003
8. B. Kim, T. Kenny et al, "Frequency stability of waferscale film encapsulated silicon based MEMS resonators," Sensors and Actuators A: Physical, 136(1) pp. 125-131, 2007 (Pubitemid 46590651)
9. R. Melamud, et al, "Temperature-compensated highstability silicon resonators," Applied Physics Letters, 90 244107, 2007
10. Park W.T.,et al., "Encapsulated submillimeter piezoresistive accelerometers." Journal of Microelectromechanical Systems, 15(3): p. 507-514., 2006 (Pubitemid 43891345)
11. K-L Chen, J. Silvia et al, "Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices ," IEEE Trans. on Advanced Packaging, 2008, In press.
12. K. Ekinci, M. Roukes et al, "Balanced electronic detection of displacement in nanoelectromechanical systems," Applied Physics Letters 81 2253, 2002 (Pubitemid 35166488)
13. P. Rantakari et al, "Reducing the effect of parasitic capacitance on MEMS measurements," Transducer, pp. 1556-1559, 2001