Reducing anchor loss in MEMS resonators using mesa isolation

Journal of Microelectromechanical Systems

Volumn 18, Issue 4, 2009, Pages 836-844

  Pandey, Manoj ^a,b   Reichenbach, Robert B ^a,c   Zehnder, Alan T ^d   Lal, Amit ^a,e   Craighead, Harold G ^a  

^a Department of Obstetrics Gynecology   (United States)

^b DS Simulia   (United States)

^c INTEL CORPORATION   (United States)

^d Cornell University   (United States)

^e DEFENSE ADVANCED RESEARCH PROJECTS AGENCY   (United States)

Author keywords

Feedback systems; Finite element methods; Isolation technology; Optical parametric amplifiers; Q factor; Surface acoustic waves

Indexed keywords

FEEDBACK SYSTEMS; FINITE-ELEMENT METHODS; ISOLATION TECHNOLOGY; OPTICAL PARAMETRIC AMPLIFIERS; Q-FACTOR; SURFACE ACOUSTIC WAVES;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE REFLECTION; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; DESIGN; ENERGY DISSIPATION; FEEDBACK; FINITE ELEMENT METHOD; LIGHT AMPLIFIERS; LIGHT TRANSMISSION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE AMPLIFIERS; PARAMETRIC AMPLIFIERS; Q FACTOR MEASUREMENT; WAVE ENERGY CONVERSION;

RESONATORS;

EID: 68849087448     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2016271     Document Type: Article

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