Influence of surface roughness of Bragg reflectors on resonance characteristics of solidly-mounted resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 4, 2007, Pages 802-808

  Chung, Chung Jen ^a   Chen, Ying Chung ^a   Cheng, Chien Chuan ^b   Wei, Ching Liang ^a   Kao, Kuo Sheng ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b DE LIN INSTITUTE OF TECHNOLOGY   (Taiwan)

^c SHU TE UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PARAMETERS; PIEZOELECTRIC LAYERS; PLANAR PROCESS; QUARTER WAVELENGTHS; REFLECTOR SURFACES; RESONANCE CHARACTERISTICS; SIMILAR COEFFICIENTS; SOLIDLY MOUNTED RESONATORS; ZERO VALUES;

ACOUSTIC IMPEDANCE; ACOUSTIC IMPEDANCE MEASUREMENT; ACOUSTICS; FREQUENCY RESPONSE; METAL ANALYSIS; MOLYBDENUM; MULTILAYERS; REFLECTION; RESONANCE; RESONATORS; SMALL NUCLEAR REACTORS; SURFACE PROPERTIES; SURFACE ROUGHNESS; THERMAL EXPANSION; TITANIUM;

BRAGG REFLECTORS;

ACOUSTICS; ARTICLE; COMPUTER SIMULATION; EQUIPMENT; EQUIPMENT DESIGN; IMPEDANCE; INSTRUMENTATION; MATERIALS TESTING; REFRACTOMETRY; SURFACE PROPERTY; THEORETICAL MODEL; TRANSDUCER;

ACOUSTICS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MODELS, THEORETICAL; REFRACTOMETRY; SURFACE PROPERTIES; TRANSDUCERS;

EID: 34248512520     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.313     Document Type: Article

References (26)

1. K. M. Lakin and J. S. Wang, "Acoustic bulk wave composite resonators," Appl. Phys. Lett., vol. 38, pp. 125-127, 1981.
2. K. M. Lakin, G. R. Kline, R. S. Ketcham, and S. G. Burns, "Thin film resonator based low insertion loss filters," in Proc. IEEE Ultrason. Symp., 1986, pp. 371-376.
3. K. M. Lakin, "Thin film resonator technology," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 52, pp. 707-716, 2005.
4. R. Weigel, D. P. Morgan, J. M. Owens, A. Ballato, K. M. Lakin, K. Hashimoto, and C. C. W. Ruppel, "Microwave acoustic materials," IEEE Trans. Microwave Theory Tech., vol. 50, pp. 738-749, 2002.
5. S. Salgar, G. Kim, D. H. Han, and B. Kim, "Modeling and simulation of the thin film bulk acoustic resonator," in IEEE Freq. Contr. Symp. PDA Exhibition, 2002, pp. 40-44.
6. H. P. Loebl, M. Klee, R. Milsom, R. Dekker, C. Metzmacher, W. Brand, and P. Lok, "Materials for bulk acoustic wave (BAW) resonators and filters," J. Eur. Ceramic Soc., vol. 21, pp. 2633-2640, 2001.
7. 2 multilayers in film bulk acoustic wave resonator devices," Jpn. J. Appl. Phys., vol. 43, pp. 1545-1550, 2004.
8. 2 multilayer reflector for rf bandpass filter application," J. Vac. Sci. Technol. B, vol. 19, no. 4, pp. 1164-1168, 2001.
9. R. Ruby and P. Merchant, "Micromachined thin film bulk acoustic resonator," in Proc. IEEE Int. Freq. Contr. Symp., 1994, pp. 135-138.
10. S. H. Park, B. C. Seo, H. D. Park, and G. Yoon, "Film bulk acoustic resonator fabrication for radio frequency filter application," Jpn. J. Appl. Phys., vol. 39, pp. 4115-4119, 2000.
11. W. E. Newell, "Face-mounted piezoelectric resonators," Proc. IEEE, vol. 53, pp. 575-581, 1965.
12. K. M. Lakin, "Development of miniature filters for wireless applications," IEEE Trans. Microwave Theory Tech., vol. 43, no. 12, pp. 2933-2939, 1995.
13. K. M. Lakin, K. T. McCarron, and R. E. Rose, "Solidly mounted resonators and filters," in Proc. IEEE Ultrason. Symp., 1995, pp. 905-908.
14. 1-x As injection lasers with distributed Bragg reflectors," Appl. Phys. Lett., vol. 27, no. 1, pp. 45-48, 1975.
15. xAs double-heterostructure injection lasers with distributed Bragg reflectors," Appl. Phys. Lett., vol. 28, no. 10, pp. 596-598, 1976.
16. F. Koyama, Y. Suematsu, S. Arai, and T. Tawee, "1.5-1.6 μm GaInAsP/InP/InP dynamic-single-mode (DSM) lasers with distributed Bragg reflector," IEEE J. Quantum Electron., vol. QE-19, no. 6, pp. 1042-1050, 1983.
17. R. Lanz and P. Muralt, "Solidly mounted BAW filters for 8 GHz based on A1N thin films," in Proc. IEEE Ultrason. Symp., 2003, pp. 178-181.
18. J. Bjurstrom, D. Rosen, I. Katardjiev, V. M. Yanchev, and I. Petrov, "Dependence of the electromechanical coupling on the degree of orientation of c-textured thin A1N films," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 10, pp. 1347-1353, 2004.
19. S. H. Lee, K. H. Yoon, and J. K. Lee, "Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators," J. Appl. Phys., vol. 92, pp. 4062-4069, 2002.
20. R. Aigner, J. Kaitila, J. Ella, L. Elbrebht, W. Nessler, M. Handtmann, T. R. Herzog, and S. Marksteiner, "Bulk-acoustic-wave filters: Performance optimization and volume manufacturing," IEEE MTT-S Digest, vol. TH5D-4, pp. 2001-2004, 2003.
21. H. Kobayashi, Y. Ishida, K. Ishikawa, A. Doi, and K. Nakamura, "Fabrication of piezoelectric thin film resonators with acoustic quarter-wave multilayers," Jpn. J. Appl. Phys., vol. 41, no. 5B, pp. 3455-3457, 2002.
22. R. Aigner, "RF-MEMS filters manufactured on silicon: Key facts about bulk-acoustic-wave technology," in Proc. Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003, pp. 157-161.
23. 3 substrates for surface acoustic wave devices," in Proc. IEEE Symp. Appl. Ferroelect., 2000, pp. 439-442.
24. 3 sub strates," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 49, pp. 345-349, 2002.
25. H. Kanbara, H. Kobayashi, and K. Nakamura, "Analysis of piezoelectric thin film resonators with acoustic quarter-wave multilayers," Jpn. J. Appl. Phys., vol. 39, no. 5B, pp. 3049-3053, 2000.
26. A. Gladkikh, Y. Lereah, E. Glickman, M. Karpovski, A. Palevski, and J. Schubert, "Hillock formation during electro-migration in Cu and Al thin films: Three-dimensional grain growth," Appl. Phys. Lett., vol. 66, no. 10, pp. 1214-1215, 1995.