High-order composite bulk acoustic resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 791-794

  Ho, Gavin K ^a   Abdolvand, Reza ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; BACTERIOPHAGES; MEMS; SUBSTRATES;

BULK ACOUSTIC RESONATORS; FREQUENCY DEVICES; HIGH ORDER MODE; LOW IMPEDANCE; MEASURED IMPEDANCE; SILICON LAYER; THICKNESS MODES; UHF RESONATORS;

ACOUSTIC RESONATORS;

EID: 48149089302     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433094     Document Type: Conference Paper

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