Effect of structural thickness, anchor length and number of anchors on performance of micromechanical bulk-mode resonators

Electronics Letters

Volumn 45, Issue 1, 2009, Pages 37-39

  Khine, L ^a   Palaniapan, M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANCHORS; RESONATORS;

GEOMETRIC PARAMETERS; HIGH QUALITIES; MEASURED RESULTS; MODE RESONATORS; MOTIONAL RESISTANCES; NODAL POINTS; OPTIMAL RANGES; QUALITY FACTORS; SQUARE RESONATORS; STRUCTURAL LAYERS; SUPPORT DESIGNS;

Q FACTOR MEASUREMENT;

EID: 58049125742     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20092835     Document Type: Article

References (6)

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2. Palaniapan, M., and Khine, L.: ' Micromechanical resonator with ultra-high quality factor ', Electron. Lett., 2007, 43, (20), p. 1090-1092 10.1049/el:20072424 0013-5194
3. Khine, L., Palaniapan, M., and Wong, W.-K.: ' 12.9MHz Lamé-mode differential SOI bulk resonators ', Transducers'07, Lyon, France, 2007, 2, p. 1753-1756
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