A diameter 300 μm Bragg reflector for acoustic isolation of resonant micro-actuators

Journal of Micromechanics and Microengineering

Volumn 21, Issue 4, 2011, Pages

  Rogers, G ^a  

^a MONASH UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ENERGY; CENTRE FREQUENCY; COMPOSITE WAVEGUIDES; FINITE-ELEMENT; ISOLATION PARAMETERS; MINIMALLY INVASIVE; QUANTITATIVE AGREEMENT;

BRAGG REFLECTORS; FINITE ELEMENT METHOD; MICROACTUATORS; NUMERICAL METHODS; STAINLESS STEEL;

REFLECTION;

EID: 79953666049     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/4/042001     Document Type: Article

References (19)

1. Rogers G 2010 Three degree-of-freedom piezoelectric ultrasonic micro-motor with a major diameter of 350 μm J. Micromech. Microeng. 20 125002
2. Watson B, Friend J and Yeo L 2009 Piezoelectric ultrasonic resonant motor with stator diameter less than 250 μm: the Proteus motor J. Micromech. Microeng. 19 022001
3. Newell W 1965 Face-mounted piezoelectric resonators Proc. IEEE 53 575-81
4. Kushwaha M, Halevi P, Dobrzynski L and Djafari-Rouhani B 1993 Acoustic band structure of periodic elastic composites Phys. Rev. Lett. 71 2022-5
5. Kushwaha M, Halevi P, Martinez G, Dobrzynski L and Djafari-Rouhani B 1994 Theory of acoustic band structure of periodic elastic composites Phys. Rev. B 49 2313-22
6. Cummer S and Schurig D 2007 One path to acoustic cloaking New J. Phys. 9 45-52
7. Chen H and Chan C 2007 Acoustic cloaking in three dimensions using acoustic metamaterials Appl. Phys. Lett. 91 183518
8. Cheng Y, Yan F, Xu J and Liu X 2008 A multilayer structured acoustic cloak with homogeneous isotropic materials Appl. Phys. Lett. 92 151913
9. Lakin K, McCarron K and Rose R 1995 Solidly mounted resonators and filters IEEE Ultrasonics Symp. pp 905-8
10. Mansfeld G and Alekseev S 1997 Theory and numerical analysis of bulk acoustic wave multilayer composite resonator structure IEEE Ultrasonics Symp. pp 891-4
11. Yeh P, Yariv A and Hong C 1977 Electromagnetic propagation in periodic stratified media: I. General theory J. Opt. Soc. Am. 67 423-38
12. Auld B 1990 Acoustic Fields and Waves in Solids vol 2 (Malabar, FL: Krieger)
13. Mai L, Pham V and Yoon G 2009 ZnO-based film bulk acoustic resonator devices on a specially designed Bragg reflector Appl. Phys. A 95 667-71
14. Wei C, Chen Y, Cheng C and Kao K 2008 Solidly mounted resonators consisting of a molybdenum and titanium Bragg reflector Appl. Phys. A 90 501-6
15. Chung C, Chen Y, Cheng C and Kao K 2008 Fabrication and frequency response of solidly mounted resonators with 1/4? mode configuration Thin Solid Films 516 5277-81 (Pubitemid 351707397)
16. Wang Y and Auld B 1985 Acoustic wave propagation in one-dimensional periodic composites IEEE Ultrasonics Symp. pp 637-41 (Pubitemid 16628551)
17. Wang Y and Auld B 1986 Numerical analysis of Bloch theory for acoustic wave propagation in one-dimensional periodic composites 6th IEEE Int. Symp. on the Applications of Ferroelectrics pp 261-4 (Pubitemid 17580315)
18. Pao Y and Mindlin R 1960 Dispersion of flexural waves in an elastic, circular cylinder J. Appl. Mech. 27 513-20
19. Ekeom D, Dubus B and Volatier A 2006 Solidly mounted resonator (SMR) FEM-BEM simulation IEEE Ultrasonics Symp. pp 1474-7