Reducing Anchor Loss in Micromechanical Extensional Mode Resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 2, 2010, Pages 448-454

  Taş, Vahdettin ^a   Olcum, Selim ^a   Aksoy, M Deniz ^a   Atalar, Abdullah ^a  

^a BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85008043167     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1425     Document Type: Article

References (17)

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