Langmuir probes in RF plasma: Surprising validity of OML theory

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Chen, Francis F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CURVE; ELECTROSTATIC PROBE; HIGH DENSITY PLASMAS; ION CURRENTS; LANGMUIRS; LOW TEMPERATURES; MATERIALS PROCESSINGS; OML THEORY; ORBITAL MOTION LIMITEDS; PARTIALLY IONIZED PLASMA; PROBE DESIGN; RADIO FREQUENCY POWER; RF PLASMA;

ELECTRIC POTENTIAL; PLASMA THEORY; WAVE PLASMA INTERACTIONS;

PROBES;

EID: 68649123384     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/035012     Document Type: Article

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