메뉴 건너뛰기




Volumn 19, Issue 11, 2009, Pages

The development of micro-gyroscope technology

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-JAMMING ABILITY; CONTROL TECHNOLOGIES; CORIOLIS; FABRICATION METHOD; KEY TECHNOLOGIES; MICRO-GYROSCOPE; SAGNAC GYROSCOPE; WORKING PRINCIPLES;

EID: 70350686657     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/11/113001     Document Type: Review
Times cited : (211)

References (129)
  • 2
    • 0032138896 scopus 로고    scopus 로고
    • Micromachined inertial sensors
    • Yazdi N, Ayazi F and Najafi K 1998 Micromachined inertial sensors Proc. IEEE 86 1640-59
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1640-1659
    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 3
    • 0141841076 scopus 로고    scopus 로고
    • Inertial sensor technology trends
    • Barbour N and Schmidt G 2001 Inertial sensor technology trends Sensors J. IEEE 1 332-9
    • (2001) Sensors J. IEEE , vol.1 , Issue.4 , pp. 332-339
    • Barbour, N.1    Schmidt, G.2
  • 4
    • 70350689383 scopus 로고    scopus 로고
    • Micromachined inertial sensors
    • Song C, Ha B and Lee S 1999 Micromachined inertial sensors Proc. IEEE 86 1640-59
    • (1999) Proc. IEEE , vol.86 , pp. 1640-1659
    • Song, C.1    Ha, B.2    Lee, S.3
  • 5
    • 0030188195 scopus 로고    scopus 로고
    • A review of recent developments in fiber optic sensor technology
    • Kersey A D 1996 A review of recent developments in fiber optic sensor technology Opt. Fiber Technol. 2 291-317
    • (1996) Opt. Fiber Technol. , vol.2 , Issue.3 , pp. 291-317
    • Kersey, A.D.1
  • 10
    • 21744452891 scopus 로고    scopus 로고
    • Design, fabrication and operation of MEMS gimbal gyroscope
    • Maenaka K, Ioku S and Sawai N 2005 Design, fabrication and operation of MEMS gimbal gyroscope Sensors Actuators 121 6-15
    • (2005) Sensors Actuators , vol.121 , Issue.1 , pp. 6-15
    • Maenaka, K.1    Ioku, S.2    Sawai, N.3
  • 13
    • 27944499406 scopus 로고    scopus 로고
    • A high-Q in-plane SOI tuning fork gyroscope
    • Sharma A, Zaman F M and Amini B V 2004 A high-Q in-plane SOI tuning fork gyroscope Proc. IEEE 1 467-70
    • (2004) Proc. IEEE , vol.1 , pp. 467-470
    • Sharma, A.1    Zaman, F.M.2    Amini, B.V.3
  • 14
    • 0031700506 scopus 로고    scopus 로고
    • Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs
    • Park K Y, Lee C W and Oh Y S 1998 Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs Sensors Actuators 64 69-76
    • (1998) Sensors Actuators , vol.64 , Issue.1 , pp. 69-76
    • Park, K.Y.1    Lee, C.W.2    Oh, Y.S.3
  • 15
    • 0036913170 scopus 로고    scopus 로고
    • Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation
    • Geen J A, Sherman S J and Chang J F 2002 Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation IEEE J. Solid-State Circuits 37 1860-6
    • (2002) IEEE J. Solid-State Circuits , vol.37 , Issue.12 , pp. 1860-1866
    • Geen, J.A.1    Sherman, S.J.2    Chang, J.F.3
  • 17
    • 0035368205 scopus 로고    scopus 로고
    • A HARPSS polysilicon vibrating ring gyroscope
    • Ayazi F and Najafi K 2001 A HARPSS polysilicon vibrating ring gyroscope Microelectromech. Syst. 10 169-79
    • (2001) Microelectromech. Syst. , vol.10 , Issue.2 , pp. 169-179
    • Ayazi, F.1    Najafi, K.2
  • 19
    • 0002548433 scopus 로고    scopus 로고
    • Performance and design of a silicon micromachined gyroscope
    • (Stuttgart, Germany)
    • Hopkin I 1997 Performance and design of a silicon micromachined gyroscope Symp. Gyro Technology (Stuttgart, Germany) pp 1.0-1.10
    • (1997) Symp. Gyro Technology , pp. 10-110
    • Hopkin, I.1
  • 20
    • 33645212524 scopus 로고    scopus 로고
    • Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration
    • Weng J H, Chieng W H and Lai J M 2005 Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration Sensors Actuators 117 230-40
    • (2005) Sensors Actuators , vol.117 , Issue.2 , pp. 230-240
    • Weng, J.H.1    Chieng, W.H.2    Lai, J.M.3
  • 21
    • 21844451899 scopus 로고    scopus 로고
    • Fabrication options and operation principle for single crystal silicon vibratory ring gyroscope
    • Chang S and Putty M W 2004 Fabrication options and operation principle for single crystal silicon vibratory ring gyroscope Proc. SPIE 5717 142-54
    • (2004) Proc. SPIE , vol.5717 , pp. 142-154
    • Chang, S.1    Putty, M.W.2
  • 24
    • 0033537523 scopus 로고    scopus 로고
    • Dual-axis micro-gyroscope with closed-loop detection
    • An S, Oh Y S and Park K Y 1999 Dual-axis micro-gyroscope with closed-loop detection Sensors Actuators 73 1-6
    • (1999) Sensors Actuators , vol.73 , Issue.1-2 , pp. 1-6
    • An, S.1    Oh, Y.S.2    Park, K.Y.3
  • 26
    • 70350632248 scopus 로고    scopus 로고
    • Micromachined 5-axis motion sensor with electrostatic drive and capacitive detection
    • Taniguchi N, Okada K and Watanabe Y 2001 Micromachined 5-axis motion sensor with electrostatic drive and capacitive detection Technical Digest of the Sensor Symp. pp 1-4
    • (2001) Technical Digest of the Sensor Symp. , pp. 1-4
    • Taniguchi, N.1    Okada, K.2    Watanabe, Y.3
  • 27
    • 33746164794 scopus 로고    scopus 로고
    • SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode
    • Watanabe Y, Mitsui T and Mineta T 2006 SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode Sensors Actuators 130-131 116-23
    • (2006) Sensors Actuators , vol.130-131 , pp. 116-123
    • Watanabe, Y.1    Mitsui, T.2    Mineta, T.3
  • 29
    • 0034273281 scopus 로고    scopus 로고
    • The silicon angular rate sensor system DAVED
    • Geiger W, Merz J and Fischer T 2000 The silicon angular rate sensor system DAVED Sensors Actuators 84 280-4
    • (2000) Sensors Actuators , vol.84 , Issue.3 , pp. 280-284
    • Geiger, W.1    Merz, J.2    Fischer, T.3
  • 30
    • 0036141726 scopus 로고    scopus 로고
    • Decoupled microgyroscopes and the design principle DAVED
    • Geiger W, Butt W U and Gaier A 2002 Decoupled microgyroscopes and the design principle DAVED Sensors Actuators 95 239-49
    • (2002) Sensors Actuators , vol.95 , Issue.2-3 , pp. 239-249
    • Geiger, W.1    Butt, W.U.2    Gaier, A.3
  • 31
    • 24144454155 scopus 로고    scopus 로고
    • Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement
    • Acar C and Shkel A M 2005 Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement J. Micromech. Microeng. 15 1092-101
    • (2005) J. Micromech. Microeng. , vol.15 , Issue.5 , pp. 1092-1101
    • Acar, C.1    Shkel, A.M.2
  • 32
    • 0036544459 scopus 로고    scopus 로고
    • A symmetric surface micromachined gyroscope with decoupled oscillation modes
    • Alper S E and Akin T 2002 A symmetric surface micromachined gyroscope with decoupled oscillation modes Sensors Actuators 97-98 347-58
    • (2002) Sensors Actuators , vol.97-98 , Issue.1-2 , pp. 347-358
    • Alper, S.E.1    Akin, T.2
  • 33
    • 33751075256 scopus 로고    scopus 로고
    • A low-cost rate-grade nickel micro-gyroscope
    • Alper S E, Silay K M and Akin T 2006 A low-cost rate-grade nickel micro-gyroscope Sensors Actuators 132 171-81
    • (2006) Sensors Actuators , vol.132 , Issue.1 , pp. 171-181
    • Alper, S.E.1    Silay, K.M.2    Akin, T.3
  • 34
    • 0033888240 scopus 로고    scopus 로고
    • A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes
    • Mochida Y, Tamura M and Ohwada K 2000 A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes Sensors Actuators 80 170-8
    • (2000) Sensors Actuators , vol.80 , Issue.2 , pp. 170-178
    • Mochida, Y.1    Tamura, M.2    Ohwada, K.3
  • 37
    • 3042786075 scopus 로고    scopus 로고
    • A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process
    • Kim J et al 2004 A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process 17th IEEE Int. Conf. on MEMS pp 556-9
    • (2004) 17th IEEE Int. Conf. on MEMS , pp. 556-559
    • Kim, J.1    Al, E.2
  • 38
    • 0034869180 scopus 로고    scopus 로고
    • A de-coupled vibratory gyroscope using a mixed micro-machining technology
    • Lee B L et al 2001 A de-coupled vibratory gyroscope using a mixed micro-machining technology Robot. Autom. 4 3412-6
    • (2001) Robot. Autom. , vol.4 , pp. 3412-3416
    • Lee, B.L.1    Al, E.2
  • 40
    • 0033741497 scopus 로고    scopus 로고
    • A new tunneling-based sensor for inertial rotation rate measurements
    • Kubena R L et al 2000 A new tunneling-based sensor for inertial rotation rate measurements Sensors Actuators 83 109-17
    • (2000) Sensors Actuators , vol.83 , Issue.1-3 , pp. 109-117
    • Kubena, R.L.1    Al, E.2
  • 41
    • 0021465934 scopus 로고
    • Inertial technology for the future: Part X. Hemispherical resonator gyroscope
    • Ragan R R and Lynch D D 1984 Inertial technology for the future: part X. Hemispherical resonator gyroscope IEEE Trans. Aerosp. Electron. Syst. 20 432
    • (1984) IEEE Trans. Aerosp. Electron. Syst. , vol.20 , pp. 432
    • Ragan, R.R.1    Lynch, D.D.2
  • 42
    • 0025698108 scopus 로고
    • Design of a solid-state gyroscopescopic sensor made of quartz
    • Soderkvist J 1990 Design of a solid-state gyroscopescopic sensor made of quartz Sensors Actuators A21/A23 293-6
    • (1990) Sensors Actuators , vol.21 , Issue.1-3 , pp. 293-296
    • Soderkvist, J.1
  • 43
    • 0028425210 scopus 로고
    • Micromachined gyroscopes
    • Söderkvist J 1994 Micromachined gyroscopes Sensors Actuators 43 65-71
    • (1994) Sensors Actuators , vol.43 , Issue.1-3 , pp. 65-71
    • Söderkvist, J.1
  • 44
    • 33646925377 scopus 로고
    • Quartz rotation (rate) sensor
    • (Cleveland, OH)
    • Orlosky S D and Morris H D 1994 Quartz rotation (rate) sensor Proc. Sensor Expo (Cleveland, OH) pp 171-7
    • (1994) Proc. Sensor Expo , pp. 171-177
    • Orlosky, S.D.1    Morris, H.D.2
  • 48
    • 0030655642 scopus 로고    scopus 로고
    • A surface acoustic wave gyroscope sensor
    • Kurosawa M et al 1997 A surface acoustic wave gyroscope sensor Sensors Actuators 66 863-6
    • (1997) Sensors Actuators , vol.66 , pp. 863-866
    • Kurosawa, M.1    Al, E.2
  • 49
    • 0034516586 scopus 로고    scopus 로고
    • Design and development of a MEMS-IDT gyroscope
    • Varadan V K et al 2000 Design and development of a MEMS-IDT gyroscope Smart Mater. Struct. 9 898-905
    • (2000) Smart Mater. Struct. , vol.9 , Issue.6 , pp. 898-905
    • Varadan, V.K.1    Al, E.2
  • 51
    • 0036819211 scopus 로고    scopus 로고
    • Surface acoustic wave MEMS gyroscope
    • Jose K A et al 2002 Surface acoustic wave MEMS gyroscope Wave Motion 36 367-81
    • (2002) Wave Motion , vol.36 , Issue.4 , pp. 367-381
    • Jose, K.A.1    Al, E.2
  • 52
    • 35649012569 scopus 로고    scopus 로고
    • A micro rate gyroscope based on the SAW gyroscopescopic effect
    • Lee S W et al 2007 A micro rate gyroscope based on the SAW gyroscopescopic effect J. Micromech. Microeng. 17 2272-9
    • (2007) J. Micromech. Microeng. , vol.17 , Issue.11 , pp. 2272-2279
    • Lee, S.W.1    Al, E.2
  • 53
    • 0015616722 scopus 로고
    • Elastic waves in rotating media
    • Schoenberg M and Censor D 1973 Elastic waves in rotating media Q. Appl. Math. 31 115-25
    • (1973) Q. Appl. Math. , vol.31 , Issue.1 , pp. 115-125
    • Schoenberg, M.1    Censor, D.2
  • 55
    • 70349661437 scopus 로고    scopus 로고
    • Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation
    • Lu Y P et al 2009 Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation Proc. the 4th IEEE pp 291-4
    • (2009) Proc. the 4th IEEE , pp. 291-294
    • Lu, Y.P.1    Al, E.2
  • 57
    • 33645228941 scopus 로고    scopus 로고
    • Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon
    • K-1-12
    • Dao D V et al 2005 Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon Proc. SPIE 6037 60370 K-1-12
    • (2005) Proc. SPIE , vol.6037 , pp. 60370
    • Dao, D.V.1    Al, E.2
  • 58
    • 33745061023 scopus 로고    scopus 로고
    • Development of a dual-axis thermal convective gas gyroscope
    • Kumagai H and Sugiyama S 2006 Development of a dual-axis thermal convective gas gyroscope J. Micromech. Microeng. 16 1301-6
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.7 , pp. 1301-1306
    • Kumagai, H.1    Sugiyama, S.2
  • 59
    • 34548035166 scopus 로고    scopus 로고
    • Development of a dual-axis convective gyroscope with low thermal-induced stress sensing element
    • Dao D V et al 2007 Development of a dual-axis convective gyroscope with low thermal-induced stress sensing element J. Microelectromech. Syst. 16 950-8
    • (2007) J. Microelectromech. Syst. , vol.16 , Issue.4 , pp. 950-958
    • Dao, D.V.1    Al, E.2
  • 61
    • 20044380766 scopus 로고    scopus 로고
    • Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology
    • Cui F et al 2004 Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology MEMS/MOEMS Technologies and Applications II vol 5641 pp 264-70
    • (2004) MEMS/MOEMS Technologies and Applications II , vol.5641 , pp. 264-270
    • Cui, F.1
  • 63
    • 0029386585 scopus 로고
    • Levitation of a micromachined rotor for application in a rotating gyroscope
    • Shearwood C et al 1995 Levitation of a micromachined rotor for application in a rotating gyroscope Electron. Lett. 32 1845-6
    • (1995) Electron. Lett. , vol.31 , Issue.21 , pp. 1845-1846
    • Shearwood, C.1    Al, E.2
  • 64
    • 0031170694 scopus 로고    scopus 로고
    • Modeling and testing of a frictionless levitated micromotor
    • Williams C B, Shearwood C and Mellor P H 1997 Modeling and testing of a frictionless levitated micromotor Sensors Actuators A 61 469-73
    • (1997) Sensors Actuators , vol.61 , Issue.1-3 , pp. 469-473
    • Williams, C.B.1    Shearwood, C.2    Mellor, P.H.3
  • 65
    • 33751239798 scopus 로고    scopus 로고
    • The study of an electromagnetic levitating micromotor for application in a rotating gyroscope
    • Zhang W et al 2006 The study of an electromagnetic levitating micromotor for application in a rotating gyroscope Sensors Actuators 132 651-7
    • (2006) Sensors Actuators , vol.132 , Issue.2 , pp. 651-657
    • Zhang, W.1    Al, E.2
  • 66
    • 0033733940 scopus 로고    scopus 로고
    • Development of a levitated micromotor for application as a gyroscope
    • Shearwood C et al 2000 Development of a levitated micromotor for application as a gyroscope Sensors Actuators 83 85-92
    • (2000) Sensors Actuators , vol.83 , Issue.1-3 , pp. 85-92
    • Shearwood, C.1    Al, E.2
  • 67
    • 44349179191 scopus 로고    scopus 로고
    • Variable-capacitance micromotor with levitated diamagnetic rotor
    • Liu W et al 2008 Variable-capacitance micromotor with levitated diamagnetic rotor Electron. Lett. 44 681-3
    • (2008) Electron. Lett. , vol.44 , Issue.11 , pp. 681-683
    • Liu, W.1    Al, E.2
  • 70
    • 85007675304 scopus 로고
    • Superconducting gyroscope: Drift data and mathematical model
    • Harding J T 1968 Superconducting gyroscope: drift data and mathematical model AIAA J. 6 305-11
    • (1968) AIAA J. , vol.6 , Issue.2 , pp. 305-311
    • Harding, J.T.1
  • 71
    • 0004621214 scopus 로고
    • Electrostatically suspended and sensed micromechanical rate gyroscope
    • Torti R et al 1994 Electrostatically suspended and sensed micromechanical rate gyroscope Proc. SPIE. 2220 27-38
    • (1994) Proc. SPIE. , vol.2220 , pp. 27-38
    • Torti, R.1    Al, E.2
  • 72
    • 0006315836 scopus 로고    scopus 로고
    • Electrostatically levitated micro motor for inertia measurement system
    • Fukatsu K, Murakoshi T and Esashi M 1999 Electrostatically levitated micro motor for inertia measurement system Technical Digest of Transducers'99 vol 16 pp 1558-61
    • (1999) Technical Digest of Transducers'99 , vol.16 , pp. 1558-1561
    • Fukatsu, K.1    Murakoshi, T.2    Esashi, M.3
  • 73
    • 0036124285 scopus 로고    scopus 로고
    • Saving energy and natural resource by micro-nanomachining
    • Esashi M 2002 Saving energy and natural resource by micro-nanomachining 15th IEEE Int. Conf. on MEMS pp 220-7
    • (2002) 15th IEEE Int. Conf. on MEMS , pp. 220-227
    • Esashi, M.1
  • 75
    • 0038346810 scopus 로고    scopus 로고
    • Electrostatically levitated ring-shaped rotational gyroscope/ accelerometer
    • Murakoshi T et al 2003 Electrostatically levitated ring-shaped rotational gyroscope/accelerometer Japan J. Appl. Phys. 42 2468-72
    • (2003) Japan J. Appl. Phys. , vol.42 , Issue.PART 1 , pp. 2468-2472
    • Murakoshi, T.1    Al, E.2
  • 76
    • 33847317981 scopus 로고    scopus 로고
    • MEMS inertial sensor toward higher accuracy & multi-axis sensing
    • Nakamura S and Tochigi Y 2005 MEMS inertial sensor toward higher accuracy & multi-axis sensing IEEE Sensors pp 939-42
    • (2005) IEEE Sensors , pp. 939-942
    • Nakamura, S.1    Tochigi, Y.2
  • 79
    • 0035396073 scopus 로고    scopus 로고
    • Modelling and design of an electrostatically levitated disk for inertial sensing applications
    • Kraft M, Farooqui M M and Evans A G R 2001 Modelling and design of an electrostatically levitated disk for inertial sensing applications J. Micromech. Microeng. 11 423-7
    • (2001) J. Micromech. Microeng. , vol.11 , Issue.4 , pp. 423-427
    • Kraft, M.1    Farooqui, M.M.2    Evans, A.G.R.3
  • 80
    • 0038779676 scopus 로고    scopus 로고
    • Electronic interface design for an electrically floating micro-disk
    • Gindila M V and Kraft M 2003 Electronic interface design for an electrically floating micro-disk J. Micromech. Microeng. 13 S11-6
    • (2003) J. Micromech. Microeng. , vol.13 , Issue.4
    • Gindila, M.V.1    Kraft, M.2
  • 81
    • 0038779657 scopus 로고    scopus 로고
    • Electroplating moulds using dry film thick negative
    • Kukharenka E et al 2003 Electroplating moulds using dry film thick negative J. Micromech. Microeng. 13 S67-74
    • (2003) J. Micromech. Microeng. , vol.13 , Issue.4
    • Kukharenka, E.1    Al, E.2
  • 82
    • 33847310888 scopus 로고    scopus 로고
    • A micromachined electrostatically suspended gyroscope with digital force feedback
    • Damrongsak B and Kraft M 2005 A micromachined electrostatically suspended gyroscope with digital force feedback IEEE Sensors pp 401-4
    • (2005) IEEE Sensors , pp. 401-404
    • Damrongsak, B.1    Kraft, M.2
  • 83
    • 38949149042 scopus 로고    scopus 로고
    • Design and simulation of a micromachined electrostatically suspended gyroscope
    • Damrongsak B and Kraft M 2006 Design and simulation of a micromachined electrostatically suspended gyroscope MEMS Sensors Actuators 267-72
    • (2006) Proc MEMS Sensors Actuators , pp. 267-272
    • Damrongsak, B.1    Kraft, M.2
  • 85
    • 0006314257 scopus 로고    scopus 로고
    • Spherical accelerometer and clinometer fabricated by ball micromachining
    • Toda R et al 2001 Spherical accelerometer and clinometer fabricated by ball micromachining Techn. Dig. Sensor Symp. 18 279-83
    • (2001) Techn. Dig. Sensor Symp. , vol.18 , pp. 279-283
    • Toda, R.1    Al, E.2
  • 86
    • 0033692648 scopus 로고    scopus 로고
    • Ball semiconductor technology and its application to MEMS
    • Takeda N 2000 Ball semiconductor technology and its application to MEMS IEEE Proc. MEMS pp 11-6
    • (2000) IEEE Proc. MEMS , pp. 11-16
    • Takeda, N.1
  • 89
    • 0345328199 scopus 로고    scopus 로고
    • An integrated optic gyroscope using ion-exchanged waveguides
    • Carriere J T 2003 An integrated optic gyroscope using ion-exchanged waveguides IEEE Lasers Electro-Opt. Soc. l 99-100
    • (2003) IEEE Lasers Electro-Opt. Soc. , vol.50 , pp. 99-100
    • Carriere, J.T.1
  • 91
    • 70350683193 scopus 로고    scopus 로고
    • Stringer J 2000 The Air Force Institute of Technology (AFIT) micro-electro-mechanical systems (MEMS) interferometric gyroscope (MIG) Master's Thesis
    • (2000) Master's Thesis
    • Stringer, J.1
  • 92
    • 0003299355 scopus 로고    scopus 로고
    • Reardon, multi-turn all-reflective optical gyroscope
    • Cole S T et al 2000 Reardon, multi-turn all-reflective optical gyroscope Opt. Exp. 7 285-91
    • (2000) Opt. Exp. , vol.7 , Issue.8 , pp. 285-291
    • Cole, S.T.1    Al, E.2
  • 93
    • 0035821939 scopus 로고    scopus 로고
    • Hybrid optic-mechanical gyroscope with injection-interferometer readout
    • Norgia M and Donati S 2001 Hybrid optic-mechanical gyroscope with injection-interferometer readout Electron. Lett. 37 756-8
    • (2001) Electron. Lett. , vol.37 , Issue.12 , pp. 756-758
    • Norgia, M.1    Donati, S.2
  • 94
    • 58049195308 scopus 로고    scopus 로고
    • Modeling and formulation of a novel microoptoelectromechanical gyroscope
    • Sun B et al 2008 Modeling and formulation of a novel microoptoelectromechanical gyroscope J. Nanomater. 2008 429168
    • (2008) J. Nanomater. , vol.2008 , pp. 429168
    • Sun, B.1    Al, E.2
  • 96
    • 0000172501 scopus 로고    scopus 로고
    • Precision rotation measurements with an atom interferometer gyroscope
    • Gustavson T L, Bouyer P and Kasevich M A 1997 Precision rotation measurements with an atom interferometer gyroscope Phys. Rev. Lett. 78 2046-9
    • (1997) Phys. Rev. Lett. , vol.78 , Issue.11 , pp. 2046-2049
    • Gustavson, T.L.1    Bouyer, P.2    Kasevich, M.A.3
  • 97
    • 33745783349 scopus 로고    scopus 로고
    • Six-axis inertial sensor using cold-atom interferometry
    • Canuel B et al 2006 Six-axis inertial sensor using cold-atom interferometry Phys. Rev. Lett. 97 010402
    • (2006) Phys. Rev. Lett. , vol.97 , Issue.1 , pp. 010402
    • Canuel, B.1    Al, E.2
  • 101
    • 28844440753 scopus 로고    scopus 로고
    • Nuclear spin gyroscope based on an atomic magnetometer
    • Kornack T W, Ghosh R K and Romalis M V 2005 Nuclear spin gyroscope based on an atomic magnetometer Phys. Rev. Lett. 95 230801
    • (2005) Phys. Rev. Lett. , vol.95 , Issue.23 , pp. 230801
    • Kornack, T.W.1    Ghosh, R.K.2    Romalis, M.V.3
  • 102
    • 0033717676 scopus 로고    scopus 로고
    • Micromachined inertial sensors state of the art and a look into the future
    • Kraft M 2000 Micromachined inertial sensors state of the art and a look into the future Meas. Control 33 164-8
    • (2000) Meas. Control , vol.33 , Issue.6 , pp. 164-168
    • Kraft, M.1
  • 105
    • 0035765713 scopus 로고    scopus 로고
    • Analysis and design of a capacitive accelerometer based on a electrostatically levitated micro-disk
    • Houlihan R et al 2001 Analysis and design of a capacitive accelerometer based on a electrostatically levitated micro-disk Proc. SPIE Conf. on Reliability pp 277-86
    • (2001) Proc. SPIE Conf. on Reliability , pp. 277-286
    • Houlihan, R.1    Al, E.2
  • 107
    • 27544443734 scopus 로고    scopus 로고
    • New surface micromachined angular sensor for vehicle stabilizing systems in automotive applications
    • Gomez U M et al 2005 New surface micromachined angular sensor for vehicle stabilizing systems in automotive applications Proc. Transducers'05 vol 1 pp 184-7
    • (2005) Proc. Transducers'05 , vol.1 , pp. 184-187
    • Gomez, U.M.1    Al, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.