-
2
-
-
0032138896
-
Micromachined inertial sensors
-
Yazdi N, Ayazi F and Najafi K 1998 Micromachined inertial sensors Proc. IEEE 86 1640-59
-
(1998)
Proc. IEEE
, vol.86
, Issue.8
, pp. 1640-1659
-
-
Yazdi, N.1
Ayazi, F.2
Najafi, K.3
-
3
-
-
0141841076
-
Inertial sensor technology trends
-
Barbour N and Schmidt G 2001 Inertial sensor technology trends Sensors J. IEEE 1 332-9
-
(2001)
Sensors J. IEEE
, vol.1
, Issue.4
, pp. 332-339
-
-
Barbour, N.1
Schmidt, G.2
-
4
-
-
70350689383
-
Micromachined inertial sensors
-
Song C, Ha B and Lee S 1999 Micromachined inertial sensors Proc. IEEE 86 1640-59
-
(1999)
Proc. IEEE
, vol.86
, pp. 1640-1659
-
-
Song, C.1
Ha, B.2
Lee, S.3
-
5
-
-
0030188195
-
A review of recent developments in fiber optic sensor technology
-
Kersey A D 1996 A review of recent developments in fiber optic sensor technology Opt. Fiber Technol. 2 291-317
-
(1996)
Opt. Fiber Technol.
, vol.2
, Issue.3
, pp. 291-317
-
-
Kersey, A.D.1
-
10
-
-
21744452891
-
Design, fabrication and operation of MEMS gimbal gyroscope
-
Maenaka K, Ioku S and Sawai N 2005 Design, fabrication and operation of MEMS gimbal gyroscope Sensors Actuators 121 6-15
-
(2005)
Sensors Actuators
, vol.121
, Issue.1
, pp. 6-15
-
-
Maenaka, K.1
Ioku, S.2
Sawai, N.3
-
13
-
-
27944499406
-
A high-Q in-plane SOI tuning fork gyroscope
-
Sharma A, Zaman F M and Amini B V 2004 A high-Q in-plane SOI tuning fork gyroscope Proc. IEEE 1 467-70
-
(2004)
Proc. IEEE
, vol.1
, pp. 467-470
-
-
Sharma, A.1
Zaman, F.M.2
Amini, B.V.3
-
14
-
-
0031700506
-
Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs
-
Park K Y, Lee C W and Oh Y S 1998 Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs Sensors Actuators 64 69-76
-
(1998)
Sensors Actuators
, vol.64
, Issue.1
, pp. 69-76
-
-
Park, K.Y.1
Lee, C.W.2
Oh, Y.S.3
-
15
-
-
0036913170
-
Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation
-
Geen J A, Sherman S J and Chang J F 2002 Single-chip surface micromachined integrated gyroscope with 50/h Allan deviation IEEE J. Solid-State Circuits 37 1860-6
-
(2002)
IEEE J. Solid-State Circuits
, vol.37
, Issue.12
, pp. 1860-1866
-
-
Geen, J.A.1
Sherman, S.J.2
Chang, J.F.3
-
17
-
-
0035368205
-
A HARPSS polysilicon vibrating ring gyroscope
-
Ayazi F and Najafi K 2001 A HARPSS polysilicon vibrating ring gyroscope Microelectromech. Syst. 10 169-79
-
(2001)
Microelectromech. Syst.
, vol.10
, Issue.2
, pp. 169-179
-
-
Ayazi, F.1
Najafi, K.2
-
19
-
-
0002548433
-
Performance and design of a silicon micromachined gyroscope
-
(Stuttgart, Germany)
-
Hopkin I 1997 Performance and design of a silicon micromachined gyroscope Symp. Gyro Technology (Stuttgart, Germany) pp 1.0-1.10
-
(1997)
Symp. Gyro Technology
, pp. 10-110
-
-
Hopkin, I.1
-
20
-
-
33645212524
-
Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration
-
Weng J H, Chieng W H and Lai J M 2005 Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration Sensors Actuators 117 230-40
-
(2005)
Sensors Actuators
, vol.117
, Issue.2
, pp. 230-240
-
-
Weng, J.H.1
Chieng, W.H.2
Lai, J.M.3
-
21
-
-
21844451899
-
Fabrication options and operation principle for single crystal silicon vibratory ring gyroscope
-
Chang S and Putty M W 2004 Fabrication options and operation principle for single crystal silicon vibratory ring gyroscope Proc. SPIE 5717 142-54
-
(2004)
Proc. SPIE
, vol.5717
, pp. 142-154
-
-
Chang, S.1
Putty, M.W.2
-
24
-
-
0033537523
-
Dual-axis micro-gyroscope with closed-loop detection
-
An S, Oh Y S and Park K Y 1999 Dual-axis micro-gyroscope with closed-loop detection Sensors Actuators 73 1-6
-
(1999)
Sensors Actuators
, vol.73
, Issue.1-2
, pp. 1-6
-
-
An, S.1
Oh, Y.S.2
Park, K.Y.3
-
27
-
-
33746164794
-
SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode
-
Watanabe Y, Mitsui T and Mineta T 2006 SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode Sensors Actuators 130-131 116-23
-
(2006)
Sensors Actuators
, vol.130-131
, pp. 116-123
-
-
Watanabe, Y.1
Mitsui, T.2
Mineta, T.3
-
29
-
-
0034273281
-
The silicon angular rate sensor system DAVED
-
Geiger W, Merz J and Fischer T 2000 The silicon angular rate sensor system DAVED Sensors Actuators 84 280-4
-
(2000)
Sensors Actuators
, vol.84
, Issue.3
, pp. 280-284
-
-
Geiger, W.1
Merz, J.2
Fischer, T.3
-
30
-
-
0036141726
-
Decoupled microgyroscopes and the design principle DAVED
-
Geiger W, Butt W U and Gaier A 2002 Decoupled microgyroscopes and the design principle DAVED Sensors Actuators 95 239-49
-
(2002)
Sensors Actuators
, vol.95
, Issue.2-3
, pp. 239-249
-
-
Geiger, W.1
Butt, W.U.2
Gaier, A.3
-
31
-
-
24144454155
-
Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement
-
Acar C and Shkel A M 2005 Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement J. Micromech. Microeng. 15 1092-101
-
(2005)
J. Micromech. Microeng.
, vol.15
, Issue.5
, pp. 1092-1101
-
-
Acar, C.1
Shkel, A.M.2
-
32
-
-
0036544459
-
A symmetric surface micromachined gyroscope with decoupled oscillation modes
-
Alper S E and Akin T 2002 A symmetric surface micromachined gyroscope with decoupled oscillation modes Sensors Actuators 97-98 347-58
-
(2002)
Sensors Actuators
, vol.97-98
, Issue.1-2
, pp. 347-358
-
-
Alper, S.E.1
Akin, T.2
-
33
-
-
33751075256
-
A low-cost rate-grade nickel micro-gyroscope
-
Alper S E, Silay K M and Akin T 2006 A low-cost rate-grade nickel micro-gyroscope Sensors Actuators 132 171-81
-
(2006)
Sensors Actuators
, vol.132
, Issue.1
, pp. 171-181
-
-
Alper, S.E.1
Silay, K.M.2
Akin, T.3
-
34
-
-
0033888240
-
A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes
-
Mochida Y, Tamura M and Ohwada K 2000 A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes Sensors Actuators 80 170-8
-
(2000)
Sensors Actuators
, vol.80
, Issue.2
, pp. 170-178
-
-
Mochida, Y.1
Tamura, M.2
Ohwada, K.3
-
36
-
-
84944721130
-
An integrated, vertical-drive, in-plane-sense micro-gyroscope
-
Bhave S A and Seeger I 2003 An integrated, vertical-drive, in-plane-sense micro-gyroscope 12th Int. Conf. on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 1 pp 171-4
-
(2003)
12th Int. Conf. on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems
, vol.1
, pp. 171-174
-
-
Bhave, S.A.1
Seeger, I.2
-
37
-
-
3042786075
-
A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process
-
Kim J et al 2004 A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process 17th IEEE Int. Conf. on MEMS pp 556-9
-
(2004)
17th IEEE Int. Conf. on MEMS
, pp. 556-559
-
-
Kim, J.1
Al, E.2
-
38
-
-
0034869180
-
A de-coupled vibratory gyroscope using a mixed micro-machining technology
-
Lee B L et al 2001 A de-coupled vibratory gyroscope using a mixed micro-machining technology Robot. Autom. 4 3412-6
-
(2001)
Robot. Autom.
, vol.4
, pp. 3412-3416
-
-
Lee, B.L.1
Al, E.2
-
40
-
-
0033741497
-
A new tunneling-based sensor for inertial rotation rate measurements
-
Kubena R L et al 2000 A new tunneling-based sensor for inertial rotation rate measurements Sensors Actuators 83 109-17
-
(2000)
Sensors Actuators
, vol.83
, Issue.1-3
, pp. 109-117
-
-
Kubena, R.L.1
Al, E.2
-
41
-
-
0021465934
-
Inertial technology for the future: Part X. Hemispherical resonator gyroscope
-
Ragan R R and Lynch D D 1984 Inertial technology for the future: part X. Hemispherical resonator gyroscope IEEE Trans. Aerosp. Electron. Syst. 20 432
-
(1984)
IEEE Trans. Aerosp. Electron. Syst.
, vol.20
, pp. 432
-
-
Ragan, R.R.1
Lynch, D.D.2
-
42
-
-
0025698108
-
Design of a solid-state gyroscopescopic sensor made of quartz
-
Soderkvist J 1990 Design of a solid-state gyroscopescopic sensor made of quartz Sensors Actuators A21/A23 293-6
-
(1990)
Sensors Actuators
, vol.21
, Issue.1-3
, pp. 293-296
-
-
Soderkvist, J.1
-
43
-
-
0028425210
-
Micromachined gyroscopes
-
Söderkvist J 1994 Micromachined gyroscopes Sensors Actuators 43 65-71
-
(1994)
Sensors Actuators
, vol.43
, Issue.1-3
, pp. 65-71
-
-
Söderkvist, J.1
-
44
-
-
33646925377
-
Quartz rotation (rate) sensor
-
(Cleveland, OH)
-
Orlosky S D and Morris H D 1994 Quartz rotation (rate) sensor Proc. Sensor Expo (Cleveland, OH) pp 171-7
-
(1994)
Proc. Sensor Expo
, pp. 171-177
-
-
Orlosky, S.D.1
Morris, H.D.2
-
48
-
-
0030655642
-
A surface acoustic wave gyroscope sensor
-
Kurosawa M et al 1997 A surface acoustic wave gyroscope sensor Sensors Actuators 66 863-6
-
(1997)
Sensors Actuators
, vol.66
, pp. 863-866
-
-
Kurosawa, M.1
Al, E.2
-
49
-
-
0034516586
-
Design and development of a MEMS-IDT gyroscope
-
Varadan V K et al 2000 Design and development of a MEMS-IDT gyroscope Smart Mater. Struct. 9 898-905
-
(2000)
Smart Mater. Struct.
, vol.9
, Issue.6
, pp. 898-905
-
-
Varadan, V.K.1
Al, E.2
-
51
-
-
0036819211
-
Surface acoustic wave MEMS gyroscope
-
Jose K A et al 2002 Surface acoustic wave MEMS gyroscope Wave Motion 36 367-81
-
(2002)
Wave Motion
, vol.36
, Issue.4
, pp. 367-381
-
-
Jose, K.A.1
Al, E.2
-
52
-
-
35649012569
-
A micro rate gyroscope based on the SAW gyroscopescopic effect
-
Lee S W et al 2007 A micro rate gyroscope based on the SAW gyroscopescopic effect J. Micromech. Microeng. 17 2272-9
-
(2007)
J. Micromech. Microeng.
, vol.17
, Issue.11
, pp. 2272-2279
-
-
Lee, S.W.1
Al, E.2
-
53
-
-
0015616722
-
Elastic waves in rotating media
-
Schoenberg M and Censor D 1973 Elastic waves in rotating media Q. Appl. Math. 31 115-25
-
(1973)
Q. Appl. Math.
, vol.31
, Issue.1
, pp. 115-125
-
-
Schoenberg, M.1
Censor, D.2
-
55
-
-
70349661437
-
Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation
-
Lu Y P et al 2009 Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation Proc. the 4th IEEE pp 291-4
-
(2009)
Proc. the 4th IEEE
, pp. 291-294
-
-
Lu, Y.P.1
Al, E.2
-
57
-
-
33645228941
-
Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon
-
K-1-12
-
Dao D V et al 2005 Development of micro motion sensors based on piezoresistive and thermo-resistive effects in silicon Proc. SPIE 6037 60370 K-1-12
-
(2005)
Proc. SPIE
, vol.6037
, pp. 60370
-
-
Dao, D.V.1
Al, E.2
-
58
-
-
33745061023
-
Development of a dual-axis thermal convective gas gyroscope
-
Kumagai H and Sugiyama S 2006 Development of a dual-axis thermal convective gas gyroscope J. Micromech. Microeng. 16 1301-6
-
(2006)
J. Micromech. Microeng.
, vol.16
, Issue.7
, pp. 1301-1306
-
-
Kumagai, H.1
Sugiyama, S.2
-
59
-
-
34548035166
-
Development of a dual-axis convective gyroscope with low thermal-induced stress sensing element
-
Dao D V et al 2007 Development of a dual-axis convective gyroscope with low thermal-induced stress sensing element J. Microelectromech. Syst. 16 950-8
-
(2007)
J. Microelectromech. Syst.
, vol.16
, Issue.4
, pp. 950-958
-
-
Dao, D.V.1
Al, E.2
-
61
-
-
20044380766
-
Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology
-
Cui F et al 2004 Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology MEMS/MOEMS Technologies and Applications II vol 5641 pp 264-70
-
(2004)
MEMS/MOEMS Technologies and Applications II
, vol.5641
, pp. 264-270
-
-
Cui, F.1
-
63
-
-
0029386585
-
Levitation of a micromachined rotor for application in a rotating gyroscope
-
Shearwood C et al 1995 Levitation of a micromachined rotor for application in a rotating gyroscope Electron. Lett. 32 1845-6
-
(1995)
Electron. Lett.
, vol.31
, Issue.21
, pp. 1845-1846
-
-
Shearwood, C.1
Al, E.2
-
64
-
-
0031170694
-
Modeling and testing of a frictionless levitated micromotor
-
Williams C B, Shearwood C and Mellor P H 1997 Modeling and testing of a frictionless levitated micromotor Sensors Actuators A 61 469-73
-
(1997)
Sensors Actuators
, vol.61
, Issue.1-3
, pp. 469-473
-
-
Williams, C.B.1
Shearwood, C.2
Mellor, P.H.3
-
65
-
-
33751239798
-
The study of an electromagnetic levitating micromotor for application in a rotating gyroscope
-
Zhang W et al 2006 The study of an electromagnetic levitating micromotor for application in a rotating gyroscope Sensors Actuators 132 651-7
-
(2006)
Sensors Actuators
, vol.132
, Issue.2
, pp. 651-657
-
-
Zhang, W.1
Al, E.2
-
66
-
-
0033733940
-
Development of a levitated micromotor for application as a gyroscope
-
Shearwood C et al 2000 Development of a levitated micromotor for application as a gyroscope Sensors Actuators 83 85-92
-
(2000)
Sensors Actuators
, vol.83
, Issue.1-3
, pp. 85-92
-
-
Shearwood, C.1
Al, E.2
-
67
-
-
44349179191
-
Variable-capacitance micromotor with levitated diamagnetic rotor
-
Liu W et al 2008 Variable-capacitance micromotor with levitated diamagnetic rotor Electron. Lett. 44 681-3
-
(2008)
Electron. Lett.
, vol.44
, Issue.11
, pp. 681-683
-
-
Liu, W.1
Al, E.2
-
70
-
-
85007675304
-
Superconducting gyroscope: Drift data and mathematical model
-
Harding J T 1968 Superconducting gyroscope: drift data and mathematical model AIAA J. 6 305-11
-
(1968)
AIAA J.
, vol.6
, Issue.2
, pp. 305-311
-
-
Harding, J.T.1
-
71
-
-
0004621214
-
Electrostatically suspended and sensed micromechanical rate gyroscope
-
Torti R et al 1994 Electrostatically suspended and sensed micromechanical rate gyroscope Proc. SPIE. 2220 27-38
-
(1994)
Proc. SPIE.
, vol.2220
, pp. 27-38
-
-
Torti, R.1
Al, E.2
-
73
-
-
0036124285
-
Saving energy and natural resource by micro-nanomachining
-
Esashi M 2002 Saving energy and natural resource by micro-nanomachining 15th IEEE Int. Conf. on MEMS pp 220-7
-
(2002)
15th IEEE Int. Conf. on MEMS
, pp. 220-227
-
-
Esashi, M.1
-
75
-
-
0038346810
-
Electrostatically levitated ring-shaped rotational gyroscope/ accelerometer
-
Murakoshi T et al 2003 Electrostatically levitated ring-shaped rotational gyroscope/accelerometer Japan J. Appl. Phys. 42 2468-72
-
(2003)
Japan J. Appl. Phys.
, vol.42
, Issue.PART 1
, pp. 2468-2472
-
-
Murakoshi, T.1
Al, E.2
-
76
-
-
33847317981
-
MEMS inertial sensor toward higher accuracy & multi-axis sensing
-
Nakamura S and Tochigi Y 2005 MEMS inertial sensor toward higher accuracy & multi-axis sensing IEEE Sensors pp 939-42
-
(2005)
IEEE Sensors
, pp. 939-942
-
-
Nakamura, S.1
Tochigi, Y.2
-
79
-
-
0035396073
-
Modelling and design of an electrostatically levitated disk for inertial sensing applications
-
Kraft M, Farooqui M M and Evans A G R 2001 Modelling and design of an electrostatically levitated disk for inertial sensing applications J. Micromech. Microeng. 11 423-7
-
(2001)
J. Micromech. Microeng.
, vol.11
, Issue.4
, pp. 423-427
-
-
Kraft, M.1
Farooqui, M.M.2
Evans, A.G.R.3
-
80
-
-
0038779676
-
Electronic interface design for an electrically floating micro-disk
-
Gindila M V and Kraft M 2003 Electronic interface design for an electrically floating micro-disk J. Micromech. Microeng. 13 S11-6
-
(2003)
J. Micromech. Microeng.
, vol.13
, Issue.4
-
-
Gindila, M.V.1
Kraft, M.2
-
81
-
-
0038779657
-
Electroplating moulds using dry film thick negative
-
Kukharenka E et al 2003 Electroplating moulds using dry film thick negative J. Micromech. Microeng. 13 S67-74
-
(2003)
J. Micromech. Microeng.
, vol.13
, Issue.4
-
-
Kukharenka, E.1
Al, E.2
-
82
-
-
33847310888
-
A micromachined electrostatically suspended gyroscope with digital force feedback
-
Damrongsak B and Kraft M 2005 A micromachined electrostatically suspended gyroscope with digital force feedback IEEE Sensors pp 401-4
-
(2005)
IEEE Sensors
, pp. 401-404
-
-
Damrongsak, B.1
Kraft, M.2
-
83
-
-
38949149042
-
Design and simulation of a micromachined electrostatically suspended gyroscope
-
Damrongsak B and Kraft M 2006 Design and simulation of a micromachined electrostatically suspended gyroscope MEMS Sensors Actuators 267-72
-
(2006)
Proc MEMS Sensors Actuators
, pp. 267-272
-
-
Damrongsak, B.1
Kraft, M.2
-
85
-
-
0006314257
-
Spherical accelerometer and clinometer fabricated by ball micromachining
-
Toda R et al 2001 Spherical accelerometer and clinometer fabricated by ball micromachining Techn. Dig. Sensor Symp. 18 279-83
-
(2001)
Techn. Dig. Sensor Symp.
, vol.18
, pp. 279-283
-
-
Toda, R.1
Al, E.2
-
86
-
-
0033692648
-
Ball semiconductor technology and its application to MEMS
-
Takeda N 2000 Ball semiconductor technology and its application to MEMS IEEE Proc. MEMS pp 11-6
-
(2000)
IEEE Proc. MEMS
, pp. 11-16
-
-
Takeda, N.1
-
88
-
-
0034480135
-
Cavity element for Resonant Micro Optical Gyroscope
-
DOI 10.1109/62.891978
-
Ford C et al 2000 Cavity element for resonant micro optical gyroscope Position Location and Navigation Symp., IEEE 56 pp 33-6 (Pubitemid 32136847)
-
(2000)
IEEE Aerospace and Electronic Systems Magazine
, vol.15
, Issue.12
, pp. 33-36
-
-
Ford, C.1
Ramberg, R.2
Johnson, K.3
Berglund, W.4
Ellerbusch, B.5
Schermer, R.6
Gopinath, A.7
-
89
-
-
0345328199
-
An integrated optic gyroscope using ion-exchanged waveguides
-
Carriere J T 2003 An integrated optic gyroscope using ion-exchanged waveguides IEEE Lasers Electro-Opt. Soc. l 99-100
-
(2003)
IEEE Lasers Electro-Opt. Soc.
, vol.50
, pp. 99-100
-
-
Carriere, J.T.1
-
91
-
-
70350683193
-
-
Stringer J 2000 The Air Force Institute of Technology (AFIT) micro-electro-mechanical systems (MEMS) interferometric gyroscope (MIG) Master's Thesis
-
(2000)
Master's Thesis
-
-
Stringer, J.1
-
92
-
-
0003299355
-
Reardon, multi-turn all-reflective optical gyroscope
-
Cole S T et al 2000 Reardon, multi-turn all-reflective optical gyroscope Opt. Exp. 7 285-91
-
(2000)
Opt. Exp.
, vol.7
, Issue.8
, pp. 285-291
-
-
Cole, S.T.1
Al, E.2
-
93
-
-
0035821939
-
Hybrid optic-mechanical gyroscope with injection-interferometer readout
-
Norgia M and Donati S 2001 Hybrid optic-mechanical gyroscope with injection-interferometer readout Electron. Lett. 37 756-8
-
(2001)
Electron. Lett.
, vol.37
, Issue.12
, pp. 756-758
-
-
Norgia, M.1
Donati, S.2
-
94
-
-
58049195308
-
Modeling and formulation of a novel microoptoelectromechanical gyroscope
-
Sun B et al 2008 Modeling and formulation of a novel microoptoelectromechanical gyroscope J. Nanomater. 2008 429168
-
(2008)
J. Nanomater.
, vol.2008
, pp. 429168
-
-
Sun, B.1
Al, E.2
-
96
-
-
0000172501
-
Precision rotation measurements with an atom interferometer gyroscope
-
Gustavson T L, Bouyer P and Kasevich M A 1997 Precision rotation measurements with an atom interferometer gyroscope Phys. Rev. Lett. 78 2046-9
-
(1997)
Phys. Rev. Lett.
, vol.78
, Issue.11
, pp. 2046-2049
-
-
Gustavson, T.L.1
Bouyer, P.2
Kasevich, M.A.3
-
97
-
-
33745783349
-
Six-axis inertial sensor using cold-atom interferometry
-
Canuel B et al 2006 Six-axis inertial sensor using cold-atom interferometry Phys. Rev. Lett. 97 010402
-
(2006)
Phys. Rev. Lett.
, vol.97
, Issue.1
, pp. 010402
-
-
Canuel, B.1
Al, E.2
-
101
-
-
28844440753
-
Nuclear spin gyroscope based on an atomic magnetometer
-
Kornack T W, Ghosh R K and Romalis M V 2005 Nuclear spin gyroscope based on an atomic magnetometer Phys. Rev. Lett. 95 230801
-
(2005)
Phys. Rev. Lett.
, vol.95
, Issue.23
, pp. 230801
-
-
Kornack, T.W.1
Ghosh, R.K.2
Romalis, M.V.3
-
102
-
-
0033717676
-
Micromachined inertial sensors state of the art and a look into the future
-
Kraft M 2000 Micromachined inertial sensors state of the art and a look into the future Meas. Control 33 164-8
-
(2000)
Meas. Control
, vol.33
, Issue.6
, pp. 164-168
-
-
Kraft, M.1
-
105
-
-
0035765713
-
Analysis and design of a capacitive accelerometer based on a electrostatically levitated micro-disk
-
Houlihan R et al 2001 Analysis and design of a capacitive accelerometer based on a electrostatically levitated micro-disk Proc. SPIE Conf. on Reliability pp 277-86
-
(2001)
Proc. SPIE Conf. on Reliability
, pp. 277-286
-
-
Houlihan, R.1
Al, E.2
-
107
-
-
27544443734
-
New surface micromachined angular sensor for vehicle stabilizing systems in automotive applications
-
Gomez U M et al 2005 New surface micromachined angular sensor for vehicle stabilizing systems in automotive applications Proc. Transducers'05 vol 1 pp 184-7
-
(2005)
Proc. Transducers'05
, vol.1
, pp. 184-187
-
-
Gomez, U.M.1
Al, E.2
|