Performance comparison of integrated Z-axis frame microgyroscopes

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 482-485

  Palaniapan, Moorthi ^a   Howe, Roger T ^a   Yasaitis, John ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT MANUFACTURE; GYROSCOPES; MICROMACHINING; POLYSILICON; PRESSURE; SPURIOUS SIGNAL NOISE;

CORIOLIS OFFSET; FRAME MICROGYROSCOPES; SCALE FACTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0038155586     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. M. Palaniapan, R. T. Howe and J. Yasaitis, "Integrated Surface-Micromachined Z-axis Frame Microgyroscope," International Electron Devices Meeting, San Francisco, California, December 9-11, 2002.
2. J. T. Kung (Analog Devices, Inc., Norwood, MA), "Methods for planarization and encapsulation of micromechanical devices in semiconductor processes," U.S. Patent 5,504,026, 1996.
3. J. A. Yasaitis et al., "Modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS," Micromachining and Microfabrication Symposium 2003, 25 31 Jan 2003, San Jose, California, USA.
4. S. Kobayashi et al, "Double-Frame Silicon Gyroscope Packaged Under Low Pressure By Wafer Bonding", Transducers '99, pp. 910-913.
5. W. Geiger et al., "Decoupled Microgyros And The Design Principle DAVED", MEMS 2001, pp. 170-173.
6. H. T. Lim et al., "A Few deg/hr Resolvable Low Noise Lateral Microgyroscope", MEMS 2002, pp. 627-630.
7. Y. Mochida, M. Tamura & K. Ohwada, "A Micromachined Vibrating Rate Gyroscope With Independent Beams For The Drive And Detection Modes," Sensors & Actuators 80 (2000), pp. 170-178.