New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 184-187

  Gomez U M ^a   Kuhlmann, B ^a   Classen, J ^a   Bauer, W ^a   Lang, C ^b   Veith, M ^a   Esch, E ^a   Frey, J ^a   Grabmaier, F ^a   Offterdinger, K ^a   Raab, T ^a   Faisst, H J ^a   Willig, R ^b   Neul, R ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b NONE

Author keywords

Angular Rate Sensor; Gyroscope; MEMS

Indexed keywords

AUTOMOTIVE ENGINEERING; CONTROL SYSTEMS; GYROSCOPES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SIGNAL TO NOISE RATIO; VEHICLES;

ANGULAR RATE SENSORS; ANGULAR RATE SIGNALS; VEHICLE STABILIZING SYSTEMS; VEHICLE'S DYNAMICS;

SENSORS;

EID: 27544443734     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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