Silicon angular rate sensor system DAVED

Sensors and Actuators, A: Physical

Volumn 84, Issue 3, 2000, Pages 280-284

  Geiger, Wolfram ^a   Merz, Jürgen ^a   Fischer, Thomas ^a   Folkmer, Bernd ^a   Sandmaier, Hermann ^a   Lang, Walter ^a  

^a Hahn Schickard Gesellschaft   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; BANDWIDTH; DIES; GYROSCOPES; MICROMACHINING; READOUT SYSTEMS; SPURIOUS SIGNAL NOISE; THERMODYNAMIC STABILITY; VACUUM TECHNOLOGY;

ANGULAR VELOCITY; DECOUPLED ANGULAR VELOCITY DETECTOR (DAVED); LOW COST INERTIAL SENSORS; RACK ELECROTONICS; VACCUM PACKAGED SENSORS;

SILICON SENSORS;

EID: 0034273281     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00392-7     Document Type: Article

References (14)

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