Packaged silicon MEMS vibratory gyroscope for microspacecraft

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 500-505

  Tang, Tony K ^a   Gutierrez, Roman C ^a   Stell, Christopher B ^a   Vorperian, Vatche ^a   Arakaki, Genji A ^a   Rice, John T ^a   Li, Wen J ^a   Chakraborty, Indrani ^a   Shcheglov, Kirill ^a   Wilcox, Jaroslava Z ^a   Kaiser, William J ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SPACECRAFT EQUIPMENT; THERMAL EFFECTS;

MICROSPACECRAFTS; VIBRATORY GYROSCOPES;

GYROSCOPES;

EID: 0030685613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)