Design and development of a MEMS-IDT gyroscope

Smart Materials and Structures

Volumn 9, Issue 6, 2000, Pages 898-905

  Varadan, V K ^a   Suh, W D ^a   Xavier, P B ^a   Jose, K A ^a   Varadan, V V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC TRANSDUCERS; DYNAMIC RESPONSE; GYROSCOPES; PIEZOELECTRIC MATERIALS; RESONATORS; SENSITIVITY ANALYSIS;

INTERDIGITAL TRANSDUCERS (IDT);

MICROELECTROMECHANICAL DEVICES;

EID: 0034516586     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/9/6/322     Document Type: Article

References (20)

1. Soderkvist J 1994 Micromachined gyroscopes Sensors Actuators A 43 65-71
2. Yazdi N, Ayazi F and Najafi K 1998 Micromachined inertial sensors Proc. IEEE 86 1640-58
3. Juneau T and Pisano A P 1996 Micromachined dual input axis angular rate sensor Tech. Digest Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC) pp 299-302
4. Tanaka K et al 1995 A micromachined vibrating gyroscope Sensors Actuators A 50 111-15
5. Park K Y et al 1997 Laterally self-oscillated and forced-balanced micro vibratory gyroscope packaged in vacuum package with a conditioning ASIC Proc. SPIE 3242 76-85
6. Putty M P and Najafi K 1994 A micromachined vibrating ring gyroscope Tech. Digest Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, June 1994) pp 213-20
7. Bell D T Jr and Li C M 1976 Surface acoustic wave resonators Proc. IEEE 64 711-21
8. Staples E J 1974 UHF surface acoustic wave resonators Ultrasonics Symp. Proc. (Piscataway, NJ: IEEE) pp 245-52
9. White R M 1985 Surface acoustic wave sensors Proc. IEEE Ultrasonics Symp. pp 490-4
10. Slobodnik A J 1976 Surface acoustic waves and SAW materials Proc. IEEE 64 581-95
11. White R M and Voltmer F W 1965 Direct piezoelectric coupling to surface acoustic waves Appl. Phys. Lett. 7 314-16
12. Lao B Y 1980 Gyroscopic effect in surface acoustic waves IEEE Ultrasonics Symp. pp 687-90
13. Kurosawa M et al 1997 A surface acoustic wave gyro sensor Int. Conf. Solid-State Sensors and Actuators (Chicago, June 16-19, 1997) pp 863-6
14. Campbell J J and Jones W R 1968 A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves IEEE Trans. Sonics Ultrasonics 15 209-17
15. Auld B A 1990 Acoustic Fields and Waves in Solids 2nd edn (Malabar, FL: Krieger)
16. Soluch W 1997 Design of SAW delay lines for sensors 11th Eur. Conf. on Solid State Transducers (Warsaw, Poland) pp 797-800
17. Haus H and Wright P V 1980 The analyses of grating structures by coupling-of-modes theory IEEE Utrasonics Symp. vol 1, pp 277-81
18. Cross P S and Schmidt R V 1977 Coupled surface acoustic wave resonator Bell System Tech. J. 56 1447-81
19. Varadan V V, Varadan V K, Bao X, Ramanathan S and Piscotty D 1997 Wireless passive IDT strain microsensor Smart Mater. Struct. 6 745-51
20. Varadan V K, Xavier P B, Suh W D, Kollakompil J A and Varadan V V, Microelectromechanical gyroscope US Patent filing No 09/594370