Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 1092-1101

  Acar, Cenk ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; ATMOSPHERIC PRESSURE; BANDWIDTH; CAPACITANCE; ELASTICITY; ELECTRODES; MICROMACHINING; SPURIOUS SIGNAL NOISE;

ACTUATION; CAPACITANCE ENHANCEMENT; DECOUPLING MECHANISMS; FABRICATION IMPERFECTIONS;

GYROSCOPES;

EID: 24144454155     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/028     Document Type: Article

References (23)

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