Dual axis operation of a micromachined rate gyroscope

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 883-886

  Juneau, Thor ^a   Pisano, A P ^a   Smith, James H ^a  

^a BSAC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; FABRICATION; MICROMACHINING; OSCILLATIONS; RESONANCE; ROTORS; SENSORS;

DUAL AXIS OPERATION; INERTIAL MEASUREMENT UNIT; MICROMACHINED RATE GYROSCOPE; RATE SENSOR; SURFACE MICROMACHINING;

GYROSCOPES;

EID: 0030648203     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)