Development of a dual-axis convective gyroscope with low thermal-induced stress sensing element

Journal of Microelectromechanical Systems

Volumn 16, Issue 4, 2007, Pages 950-958

  Dao, Dzung Viet ^a,b   Dau, Van Thanh ^a   Shiozawa, Tatsuo ^c   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

^c Iida   (Japan)

Author keywords

Gas gyroscope; Piezoresistive; Si thermistor; Thermal convective; Thermoresistive

Indexed keywords

HEAT CONVECTION; SEMICONDUCTING SILICON; SENSITIVITY ANALYSIS; TEMPERATURE SENSORS; THERMAL STRESS; THERMISTORS;

DUAL-AXIS CONVECTIVE GYROSCOPE; GAS GYROSCOPE; MICROTHERMAL SENSING ELEMENT; PIEZORESISTIVE; THERMAL CONVECTIVE; THERMORESISTIVE;

GYROSCOPES;

EID: 34548035166     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.896700     Document Type: Article

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