An integrated, vertical-drive, in-plane-sense microgyroscope

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 171-174

  Bhave, S A ^a   Seeger, J I ^a   Jiang, Xuesong ^a   Boser, B E ^a   Howe, R T ^a   Yasaitis, J ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b ANALOG DEVICES INC   (United States)

Author keywords

Acceleration; Accelerometers; CMOS process; CMOS technology; Electrodes; Force feedback; Gyroscopes; Mechanical sensors; Oscillators; Springs

Indexed keywords

ACCELERATION; ACCELEROMETERS; ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTRODES; GYROSCOPES; MICROSYSTEMS; OSCILLATORS (ELECTRONIC); SPRINGS (COMPONENTS); TRANSDUCERS;

AMBIENT PRESSURES; ANALOG DEVICES; CMOS PROCESSS; CMOS TECHNOLOGY; FORCE FEEDBACK; MECHANICAL SENSORS; MICRO-GYROSCOPE; RATE SENSORS;

SOLID-STATE SENSORS;

EID: 84944721130     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215280     Document Type: Conference Paper

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