Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA Technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5641, Issue , 2004, Pages 264-275

  Cui, Feng ^a   Chen, Wenyuan ^a   Su, Yufeng ^a   Zhang, Weiping ^a   Zhao, Xiaolin ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Electrostatic levitation; Micromachined accelerometer; Micromachined gyroscope; Rotor; UV LIGA

Indexed keywords

ELECTROFORMING; ELECTROSTATICS; LEVITATION MELTING; MICROMACHINING; REACTIVE ION ETCHING; ROTORS; SILICON; SPEED CONTROL; SUBSTRATES; ULTRAVIOLET DEVICES; VACUUM APPLICATIONS;

ELECTROSTATIC LEVITATION; MICROMACHINED ACCELEROMETERS; MICROMACHINED GYROSCOPES; UV-LIGA;

GYROSCOPES;

EID: 20044380766     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.575632     Document Type: Conference Paper

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