A de-coupled vibratory gyroscope using a mixed micro-machining technology

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 4, Issue , 2001, Pages 3412-3416

  Lee, B L ^a   Lee, S W ^a   Jung, K D ^a   Choi, J H ^a   Chung, T R ^a   Cho, Y C ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BANDWIDTH; CRYSTALLINE MATERIALS; LOW PASS FILTERS; MICROMACHINING; SENSORS; SILICON WAFERS; VIBRATIONS (MECHANICAL);

VIBRATORY GYROSCOPES;

GYROSCOPES;

EID: 0034869180     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2001.933145     Document Type: Conference Paper

References (10)

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8. A dynamically tuned vibratory micromichanical gyroscope and accelerometer
9. A surface micro machined tunable vibratory gyroscope