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Volumn 36, Issue 4, 2002, Pages 367-381

Surface acoustic wave MEMS gyroscope

(5) Jose, K A a Suh, W D a Xavier, P B a Varadan, V K a Varadan, V V a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; RESONATORS;

METALLIC DOTS;

ACOUSTIC SURFACE WAVE DEVICES;

ACOUSTICS; DESIGN; GYROSCOPE; MICROELECTROMECHANICAL SYSTEM; PERFORMANCE ASSESSMENT;

EID: 0036819211 PISSN: 01652125 EISSN: None Source Type: Journal
DOI: 10.1016/S0165-2125(02)00030-6 Document Type: Article

Times cited : (61)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.