Novel solid micro-gyroscope

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 634-637

  Maenaka, K ^a   Kohara, H ^a   Nishimura, M ^a   Fujita, T ^a   Takayama, Y ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRIC POTENTIAL; FORCE CONTROL; MICROMACHINING; PRISMS; VIBRATIONS (MECHANICAL);

CORIOLIS FORCE; MICRO-GYROSCOPES; REFERENCE VIBRATIONS;

GYROSCOPES;

EID: 33750126329     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2006.1627879     Document Type: Conference Paper

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