Two-dimensional micromachined gyroscope

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 887-890

  Fujita, T ^a   Mizuno, T ^a   Kenny, R ^a   Maenaka, K ^a   Maeda, M ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRODES; MICROMACHINING; ROTATION; SILICON SENSORS; SUBSTRATES;

ANGULAR RATE; MULTI AXIS DETECTION; RATE SENSOR; TWO DIMENSIONAL MICROMACHINED GYROSCOPE;

GYROSCOPES;

EID: 0030673533     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)